A Novel Pump for MEMS Applications

M. Sen,Daniel Wajerski,M. Gad-el-Hak

DOI: https://doi.org/10.1115/1.2817807

1996-09-01

Abstract:Department of Aerospace and Mechanical EngineeringUniversity of Notre DameNotre Dame, IN 46556We present a novel approach for pumping fluids in micromechanical applications atextremely low Reynolds numbers. It is based on the rotation of a cylinder placed asymmetricallyin a narrow duct; the differential viscous resistance between the small and large gaps causes a netflow along the channel. We report on experiments using glycerin and several cm-scale prismshaving circular, square and rectangular cross-sections. The Reynolds number, based on cylindersize and angular velocity, varies in the range of 0.01–10. The flow is visualized using tracerparticles. The flow generated depends on the geometrical parameters, but is proportional to theangular velocity of the cylinder. An average flow velocity that is about 10% of the surface speedof the cylinder has been obtained.Manufacturing processes that can create extremely small machines have been developed inrecent years. Motors, electrostatic actuators, pneumatic actuators, valves, gears and tweezers ofabout 10 µm size have been fabricated. These have been used as sensors for pressure,temperature, velocity, mass flow, or sound, and as actuators for linear and angular motions.Current usage ranges from airbags to blood analysis (O'Connor, 1992). There is considerablework under way to include other applications, one example being the micro-steam engine describedby Lipkin (1993). Many of these new applications will need fluid to be pumped in a duct; at suchsmall scales this is a challenge.There have been several studies of microfabricated pumps. Some of them use non-mechanical effects. Ion-drag is used in electrohydrodynamic pumps (Bart et al., 1990; Richter et