Abstract:The development of real-time control strategies for key discharge parameters, such as densities, fluxes, and energy distributions, is of fundamental interest to many plasma sources. Over the last decade, multi-harmonic 'tailored' voltage waveforms have been successfully employed to achieve enhanced control of key parameters in a wide range of radio-frequency (RF) plasma sources through application of the electrical asymmetry effect (EAE). More recently, the analogous magnetic asymmetry effect (MAE) has been numerically and experimentally demonstrated to achieve a notable degree of control in parallel plate RF plasma sources. The MAE is achieved via selectively magnetising the charged species adjacent to one electrode, altering the charge flux to the surface and enforcing a DC self-bias to maintain quasineutrality. This study addresses the degree of control achieved by the MAE in a non-planar geometry via 2D fluid/kinetic simulations of a magnetised RF capacitively coupled plasma (RF-CCP) source employing two different magnetic topologies. The simultaneous application of the EAE and MAE is then presented for the same geometry, demonstrating a degree of non-linear behaviour dependant upon the applied magnetic topology. Control of the DC self-bias voltage ηDC is demonstrated for a single 600 Vpp, 13.56 MHz discharge in both 'convergent' (maximum on-axis field strength) and 'divergent' (minimum on-axis field strength) magnetic topolgies. MAE induced modulations of ηDC = 0.13 Vpp and ηDC = 0.03 Vpp are achieved for each magnetic topology, respectively, for magnetic field strengths between 50 - 1000 G. Simultaneous application of an EAE and MAE is achieved through a multi-harmonic 'peak'-type tailored voltage waveform employing varying harmonic phase offsets between 0◦ ≤ θ ≤ 360◦ . The degree to which the DC self-bias voltage is modulated by the applied EAE is mediated by the orientation and magnitude of the applied magnetic field. The EAE induced DC self-bias modulations exhibit non-linear behaviour in response to a superimposed MAE, such that the resulting DC self-bias differs from an additive combination of the two effects alone Simultaneous application of the electrical and magnetic asymmetry effects offers the possibility of further decoupling ion and electron dynamics in RF plasma sources, and represents an improvement over each approach in isolation.

The E × B magnetized plasma device (EMPD)

Intrinsic Evolution of the Decoupling and Coupling of the Plasma Density and Temperature in a Cylindrical Laboratory Plasma Device

Development and Optimization of Step-A Linear Plasma Device for Plasma-Material Interaction Studies

The Madison plasma dynamo experiment: a facility for studying laboratory plasma astrophysics

D-Mag: a laboratory for studying plasma physics and diagnostics in strong magnetic fields

Electron Cyclotron Resonance (ECR) Magnetometry with a Plasma Reservoir

Exploring the mechanism of axial ion energy acquisition and loss in an magnetoplasmadynamic thruster plume

Optimal design and experimental testing of EMPI system for plasma disruption mitigation on J-TEXT

Magnetic enhancement of the electrical asymmetry effect in capacitively coupled plasmas

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode

Coupled plasma transport and electromagnetic wave simulation of an ECR thruster

Three-dimensional modeling of a plasma in a strong azimuthal magnetic field

A dc plasma source for plasma–material interaction experiments

Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge

Determination of Plasma Displacement Based on Eddy Current Diagnostics for the Keda Torus Experiment

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Thermodynamic Parameters and Energy Transfer Analysis of High Enthalpy Inductively Coupled Plasma

Modeling of the ECCD injection effect on the Heliotron J and LHD plasma stability

Design, construction, and calibration of a three-axis, high-frequency magnetic probe (B-dot probe) as a diagnostic for exploding plasmas

Nonlinear Dynamics of Fluctuations in the Presence of Sheared Parallel and Perpendicular Flows in a Magnetized Laboratory Plasma

Measurement of Helicity Flux Density Using the Eddy-Current Diagnostic System in Keda Torus Experiment Device