Optical probing of electric fields with an electro-acoustic effect toward integrated circuit diagnosis.

Rulong Jin,Han Yang,Di Zhao,Qidai Chen,Zhao-Xu Yan,M. Yi,Hongbo Sun
DOI: https://doi.org/10.1364/OL.35.000580
IF: 3.6
2010-02-15
Optics Letters
Abstract:Electro-optic probing of electric fields has been considered as a promising approach for integrated circuit diagnosis. However, the method is subject to relatively weak voltage sensitivity. In this Letter, we solve the problems with electro-acoustic effect. In contrast to the general electro-optic effect, the light phase modulation induced by the acoustic effect is 2 orders of magnitude stronger at its resonant frequency, as we observed in a GaAs thin film probe. Furthermore, this what we believe to be a novel method shows a highly reproducible linearity between the detected signals and the input voltages, which facilitates the voltage calibration.
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