Self-Enclosed Nanofiber-Reinforced PDMS Channels Using Ultrafast Laser Irradiation

H. Selvaraj,B. Tan,K. Venkatakrishnan
DOI: https://doi.org/10.1109/JMEMS.2012.2205136
IF: 2.829
2012-07-18
Journal of Microelectromechanical Systems
Abstract:We report on an innovative method to fabricate self-enclosed reinforced Polydimethylsiloxane (PDMS) microchannels using femtosecond laser pulses of megahertz pulse frequency. It involves nanofibrous structure generation and site-specific curing of PDMS. The rapid curing is due to accumulated heating at repetitive irradiation and can be explained by a volume-constrained temperature rise. The proposed technique permits both reinforcement and rapid curing and is ideal for fabricating reinforced structures in microscale. No additives are used in fabricating the nanofiber-reinforced enclosed channels. Since our method does not require a mask, it is relatively cheaper and faster compared with other conventional lithography techniques.
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