Finfet with fully PH-responsive HFO2 as highly stable biochemical sensor

S. Rigante,M. Wipf,A. Bazigos,K. Bedner,D. Bouvet,A. Ionescu
DOI: https://doi.org/10.1109/MEMSYS.2014.6765828
2014-03-13
Abstract:In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO<sub>2</sub> gate oxide demonstrate full pH-response with ΔV<sub>th</sub> ≈ 56 mV/pH. High readout sensitivity S<sub>out</sub> = ΔI<sub>d</sub>/I<sub>d</sub> ≈ 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and I<sub>on</sub>/I<sub>off</sub> =1.5×10<sup>6</sup>. High long-term stability is proven over 4.5 days with a drift in time limited at 0.14 mV/h.
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