Novel laser datum system for nanometric profilometry for large optical surfaces.

Ho-Soon Yang,Sug-Whan Kim,D. Walker
DOI: https://doi.org/10.1364/OE.11.000624
IF: 3.8
2003-03-24
Optics Express
Abstract:We report a new laser datum system for precision point-by-point profilometry of large curved optical surfaces. The laser datum is sensed by a nulling quadrant photodiode mounted in a flexural system with hybrid actuators, which also carries interferometer reference optics for vertical and horizontal displacement measurement. The flexure characteristics such as cross-talk and hysteresis were investigated. The optimum environmental conditions for the active position-control were studied, and closed-loop control was modeled. The experimental results for compensation accuracy showed a repeatability of +/- 4 nm rms, the compensation accuracy of 10 nm (vertical channel) and 20 nm (horizontal channel).
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