Modulation Transfer Function of AZ111 Photoresist.

R. Brandes,R. Curran
DOI: https://doi.org/10.1364/AO.10.002101
IF: 1.9
1971-09-01
Applied Optics
Abstract:For the utilization of photoresist materials it is desirable to describe quantitatively the photoresist image and thereby introduce control over photoresist processing. The photoresist AZ111 has been shown to be a linear image recording medium and a modulation transfer function (MTF) defined and measured. Measured and calculated image profiles in this resist are quite comparable.
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