Dissociation of Hydrofluorocarbon Molecules after Electron Impact in Plasma

Dmitry V. Makhov,Gregory Armstrong,Hsiao-Han Chuang,Harin Ambalampitiya,Kateryna Lemishko,Sebastian Mohr,Anna Nelson,Jonathan Tennyson,Dmitrii Shalashilin
DOI: https://doi.org/10.1021/acs.jpclett.4c00348
IF: 6.888
2024-03-20
The Journal of Physical Chemistry Letters
Abstract:The process of dissociation for two hydrofluorocarbon molecules in low triplet states excited by electron impact in plasma is investigated by ab initio molecular dynamics (AIMD). The interest in the dissociation of hydrofluorocarbons in plasma is motivated by their role in plasma etching in microelectronic technologies. Dissociation of triplet states is very fast, and the reaction products can be predicted. In this work, it was found that higher triplet states relax into the lowest triplet state...
chemistry, physical,physics, atomic, molecular & chemical,nanoscience & nanotechnology,materials science, multidisciplinary
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