DNA profiling analysis of endometrial and ovarian cell lines reveals misidentification, redundancy and contamination.

C. Korch,M. Spillman,T. Jackson,B. Jacobsen,S. Murphy,B. Lessey,V. Jordan,A. Bradford

DOI: https://doi.org/10.1016/j.ygyno.2012.06.017

IF: 5.304

2012-10-01

Gynecologic Oncology

Abstract:

What problem does this paper attempt to address?

Magnetostrictive Strain Monitoring of Cement-Based Magnetoelectric Composites in A Variable Magnetic Field by Fiber Bragg Grating

Huafu Pei,Cuijuan Pang,Bin Zhu,Zongjin Li

DOI: https://doi.org/10.1016/j.conbuildmat.2017.05.158

IF: 7.4

2017-01-01

Construction and Building Materials

Abstract:In this paper, a cement-based magnetoelectric (ME) laminated composite is fabricated by bonding the piezoelectric material lead zirconate titanate (PZT) between two C-M layers made of the mixture of cement and magnetostrictive material to form a sandwich structure. As well known, inherent measurement errors of traditional electric sensors are definitely induced by magnetic interference in magnetic field. Thus, it is impossible to measure the magnetostrictive strain due to a variable magnetic field. In this paper, the fiber Bragg grating (FBG) sensors were used instead of the traditional strain gauges to measure the strain of the cement-based magnetostrictive layers in a variable bias magnetic field. It can be concluded that the FBG sensors is a reliable choice as its tiny size, high sensitivity and immunity to magnetic interference.
Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Madhu Santosh Ku Mutyala,Deepika Bandhanadham,Liu Pan,Vijaya Rohini Pendyala,Hai-Feng Ji

DOI: https://doi.org/10.1007/s10409-008-0222-6

IF: 3.5

2009-01-01

Acta Mechanica Sinica

Abstract:Advances in the field of micro electro mechanicalsystems and their uses now offer unique opportunities inthe design of ultrasensitive analytical tools.The analyticalcommunity continues to search for cost-effective,reliable,and even portable analytical techniques that can give reli-able and fast response results for a variety of chemicals andbiomolecules.Microcantilevers（MCLs）have emerged as aunique platform for label-free chem-sensor or bioassay.Sev-eral electronic designs,including piezoresistive,piezoelec-tric,and capacitive approaches,have been applied to measurethe bending or frequency change of the MCLs upon exposureto chemicals.This review summarizes mechanical,fabrica-tion,and electronics approaches to increase the sensitivity ofMCL sensors.
Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

W Zhou,A Khaliq,YJ Tang,HF Ji,RR Selmic

DOI: https://doi.org/10.1016/j.sna.2005.07.009

2005-01-01

Abstract:This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivolt range that replaces the conventional laser-based position-sensitive detection systems. The sensing principle is based upon changes in the deflection induced by environmental factors in the medium where a microcantilever is immersed. Bending of the cantilever induces the potential difference on opposite sides of the piezoelectric layer providing an information signal about the detected chemicals.To obtain an application specific optimum design parameters and predict the cantilever performance ahead of actual fabrication, finite element analysis (FEM) simulations using CoventorWare (a MEMS design and simulation program) were performed. Analytical models of multi-layer cantilevers as well as simulation concept are described. Both mechanical and piezoelectric simulation results are carried out. The cantilever structures are analyzed and fabrication process steps are proposed. (c) 2005 Elsevier B.V All rights reserved.
Phase Sensitivity and Phase Noise of Cantilever-Type Magnetoelastic Sensors Based on the $Δ$E Effect

Phillip Durdaut,Enrico Rubiola,Jean-Michel Friedt,Cai Müller,Benjamin Spetzler,Christine Kirchhof,Dirk Meyners,Eckhard Quandt,Franz Faupel,Jeffrey McCord,Reinhard Knöchel,Michael Höft

DOI: https://doi.org/10.48550/arXiv.2003.01085

2020-03-02

Instrumentation and Detectors

Abstract:Magnetoelastic sensors for the detection of low-frequency and low-amplitude magnetic fields are in the focus of research since more than 30 years. In order to minimize the limit of detection (LOD) of such sensor systems, it is of high importance to understand and to be able to quantify the relevant noise sources. In this contribution, cantilever-type electromechanic and magnetoelastic resonators, respectively, are comprehensively investigated and mathematically described not only with regard to their phase sensitivity but especially to the extent of the sensor-intrinsic phase noise. Both measurements and calculations reveal that the fundamental LOD is limited by additive phase noise due to thermal-mechanical noise of the resonator, i.e. by thermally induced random vibrations of the cantilever, and by thermal-electrical noise of the piezoelectric material. However, due to losses in the magnetic material parametric flicker phase noise arises, limiting the overall performance. In particular it is shown that the LOD is virtually independent of the magnetic sensitivity but is solely determined by the magnetic losses. Instead of the sensitivity, the magnetic losses, represented by the material's effective complex permeability, should be considered as the most important parameter for the further improvement of such sensors in the future. This implication is not only valid for magnetoelastic cantilevers but also applies to any type of magnetoelastic resonator.
High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer

Thomas Mion,Michael J D'Agati,Sydney Sofronici,Konrad Bussmann,Margo Staruch,Jason L Kost,Kevin Co,Roy H Olsson 3rd,Peter Finkel

DOI: https://doi.org/10.3390/s23208626

2023-10-21

Abstract:Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed-fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co1-xFex)-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron-cobalt-hafnium alloy (Fe0.5Co0.5)0.92Hf0.08 that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed.
Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Benjamin Spetzler,Elizaveta V Golubeva,Ron-Marco Friedrich,Sebastian Zabel,Christine Kirchhof,Dirk Meyners,Jeffrey McCord,Franz Faupel,Elizaveta V. Golubeva

DOI: https://doi.org/10.3390/s21062022

IF: 3.9

2021-03-12

Sensors

Abstract:Magnetoelectric resonators have been studied for the detection of small amplitude and low frequency magnetic fields via the delta-E effect, mainly in fundamental bending or bulk resonance modes. Here, we present an experimental and theoretical investigation of magnetoelectric thin-film cantilevers that can be operated in bending modes (BMs) and torsion modes (TMs) as a magnetic field sensor. A magnetoelastic macrospin model is combined with an electromechanical finite element model and a general description of the delta-E effect of all stiffness tensor components Cij is derived. Simulations confirm quantitatively that the delta-E effect of the C66 component has the promising potential of significantly increasing the magnetic sensitivity and the maximum normalized frequency change Δfr. However, the electrical excitation of TMs remains challenging and is found to significantly diminish the gain in sensitivity. Experiments reveal the dependency of the sensitivity and Δfr of TMs on the mode number, which differs fundamentally from BMs and is well explained by our model. Because the contribution of C11 to the TMs increases with the mode number, the first-order TM yields the highest magnetic sensitivity. Overall, general insights are gained for the design of high-sensitivity delta-E effect sensors, as well as for frequency tunable devices based on the delta-E effect.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Sensitivity and Noise Evaluation of a Bonded Magneto(elasto) Electric Laminated Sensor Based on In-Plane Magnetocapacitance Effect for Quasi-Static Magnetic Field Sensing

Xin Zhuang,Marc Lam Chok Sing,Christophe Dolabdjian,Yaojin Wang,Peter Finkel,Jiefang Li,Dwight Viehland

DOI: https://doi.org/10.1109/tmag.2014.2356852

IF: 1.848

2015-01-01

IEEE Transactions on Magnetics

Abstract:The quasi-static magnetic field detection of a layer-bonded magneto(elasto) electric (ME) laminate has been investigated by measuring the in-plane electric capacitance via its interdigital electrodes close to the piezoelectric resonant frequency. The ME-layered composite is considered as a stress-induced dielectric effect because there is practically no direct response of the electric capacitance to an external magnetic field. The sensitivity is dominated by the magnetoelastic coupling in the magnetic layer and on the stress induced by the permittivity change in the piezoelectric layer. The low-frequency magnetocapacitance effect is sensitive to an external magnetic bias which can modulate the electric permittivity by producing a stress. The magnetoelastic coupling is another important parameter for this magnetic field detection mode. For a given magnetic field, the amplitude of the magnetostriction is directly related to this parameter as well. Therefore, an optimal magnetic bias can maximize the induced strain or stress which is coupled into the piezoelectric layer through the change of the electric permittivity in this layer. To evaluate the sensitivity and the noise performance by the magnetocapacitance effect, we have used the piezoelectric and magnetic constitutive equations to predict the permittivity dependence. Experimentally, this sensor achieved an equivalent magnetic noise spectral density, presently still limited, by the noise of the detection electronics, $\sim 100$ pT/ $\surd $ Hz at 1 Hz and offered a dc detection capability. With the model and experimental nonlinear factors, an equivalent sensor noise spectral density close to the pT/ $\surd $ Hz can be ultimately predicted considering the mechanical loss limitation of the sensor.

engineering, electrical & electronic,physics, applied
Low Noise Inverse Magnetoelectric Magnetic Field Sensor

L. Thormählen,P. Hayes,E. Elzenheimer,E. Spetzler,J. McCord,G. Schmidt,M. Höft,D. Meyners,E. Quandt

2023-12-08

Abstract:In the development of any type of magnetic field sensor based on magnetic films, special consideration must be given to the magnetic layer component. The presented work investigates the use of flux closing magnetostrictive multilayers for inverse magnetoelectric sensors. In such a type of magnetic field sensor, highly sensitive AC and DC field detection relies on strong excitation of the incorporated magnetic layers by piezoelectrically driven cantilever oscillation at mechanical resonances. The provoked periodic flux change is influenced by the magnetic field to be measured and is picked up by a coil, which generates the measured output. The effect of the magnetic multilayer on linearity, noise behavior, and detection limit of DC and AC signals is investigated. This study demonstrates the next step for inverse magnetoelectric thin film sensors, which achieve one order of magnitude improved detection limits with less than $8 pT/Hz^{1/2}$ at $10 Hz$ and $18 pT/Hz^{1/2}$ at $DC$ using exchange bias stabilized magnetic multilayers for obtaining flux closure.

Signal Processing
Low-noise inverse magnetoelectric magnetic field sensor

L. Thormählen,P. Hayes,E. Elzenheimer,E. Spetzler,G. Schmidt,M. Höft,J. McCord,D. Meyners,E. Quandt

DOI: https://doi.org/10.1063/5.0196637

IF: 4

2024-04-22

Applied Physics Letters

Abstract:In the development of any type of magnetic field sensor based on magnetic films, special consideration must be given to the magnetic layer component. The presented work investigates the use of scalable flux closing magnetostrictive multilayers for inverse magnetoelectric sensors. In such a type of magnetic field sensor, highly sensitive AC and DC field detection relies on strong excitation of the incorporated magnetic layers by piezoelectrically driven cantilever oscillation at mechanical resonances. The provoked periodic flux change is influenced by the magnetic field to be measured and is picked up by a coil, which generates the measured output. The multilayered inverse magnetoelectric sensor is investigated with regard to linearity, noise behavior, and detection limit of DC and AC signals. A significant advancement for inverse magnetoelectric thin film sensors is demonstrated in this study. Using exchange bias stabilized magnetic multilayers with flux closure structures, detection limits are improved by an order of magnitude to less than 8 pT/Hz1/2 at 10 Hz and 18 pT/Hz1/2 at DC.

physics, applied
Design and Analysis of A Self-Biased Broadband Magnetoelectric Cantilever Operated at Multi-Frequency Windows

J. N. Ma,C. Z. Xin,J. Ma,Y. H. Lin,C. W. Nan

DOI: https://doi.org/10.1063/1.4978872

IF: 1.697

2017-01-01

AIP Advances

Abstract:Magnetoelectric (ME) composites with self-biased and wide resonance frequency band properties are promising candidates for magnetic field sensor and energy harvester. Here, we present a ME cantilever by in-series connecting a few SrFe12O19/Metglas/Pb(Zr,Ti)O3 components. Due to the in-built magnetic bias of SrFe12O19, the ME cantilever shows self-biased property. Meanwhile, by merging the resonance responses of the in-series ME components together, the ME cantilever presents multi-wide resonance bands (i.e., 500 Hz ∼ 700 Hz, 3.3 kHz ∼ 4.4 kHz and 44 kHz ∼ 70 kHz). In these three wide frequency windows, the ME voltage coefficients (αV) of the ME cantilever are higher than 40 mV/Oe, 115 mV/Oe and 400 mV/Oe, respectively.
Nonlinear dynamic finite element model for magnetostrictive/piezoelectric laminated composite magnetoelectric sensors

Na Zhang,BoWen Wang,Li Wang,Shuying Li,Zhihua Wang,Ling Weng,Wenmei Huang,Na Li

2012-01-01

Abstract:The dynamic equation of magneto-mechanical-electric characteristics for magnetoelectric sensors is founded via Hamilton variational principles, based on the standard square equation of magnetostrictive materials and linear constitutive equation of piezoelectric materials. The magnetic hysteresis and ΔE effect of magnetostrictive materials for the dynamic equation are considered. The output-voltage characteristic of the magnetoelectric sensors is calculated by using the dynamic equation. The calculating results show that the model can predict the change of output voltage with time in different bias and driving magnetic fields. For example, the error between calculating result and experimental one is only 0.9%, in the bias magnetic field of 22.1 kA/m, the driving magnetic field of 7.4 kA/m and at the frequency of 100 Hz. At same time, the model can be used to determine the maximum driving magnetic field of magnetoelectric sensors.
Miniature magneto-oscillatory wireless sensor for magnetic field and gradient measurements

Felix Fischer,Moonkwang Jeong,Tian Qiu

DOI: https://doi.org/10.1063/5.0222971

2024-10-22

Abstract:Magneto-oscillatory devices have been recently developed as very potent wireless miniature position trackers and sensors with an exceptional accuracy and sensing distance for surgical and robotic applications. However, it is still unclear to which extend a mechanically resonating sub-millimeter magnet interacts with external magnetic fields or gradients, which induce frequency shifts of sub-mHz to several Hz and therefore affect the sensing accuracy. Here, we investigate this effect experimentally on a cantilever-based magneto-oscillatory wireless sensor (MOWS) and build an analytical model concerning magnetic and mechanical interactions. The millimeter-scale MOWS is capable to detect magnetic fields with sub-uT resolution to at least +/- 5 mT, and simultaneously detects magnetic field gradients with a resolution of 65 uT/m to at least +/- 50 mT/m. The magnetic field sensitivity allows direct calculation of mechanical device properties, and by rotation, individual contributions of the magnetic field and gradient can be analyzed. The derived model is general and can be applied to other magneto-oscillatory systems interacting with magnetic environments.

Robotics,Applied Physics
Curvature and Stress Effects on the Performance of Contour-Mode Resonant ΔE Effect Magnetometers

Alexei D Matyushov,Benjamin Spetzler,Mohsen Zaeimbashi,James Zhou,Zhenyun Qian,Elizaveta V Golubeva,Cheng Tu,Yingxue Guo,Brian F Chen,Damo Wang,Alexandria Will-Cole,Huaihao Chen,Matteo Rinaldi,Jeffrey McCord,Franz Faupel,Nian X Sun

DOI: https://doi.org/10.1002/admt.202100294

Abstract:Miniaturized piezoelectric/magnetostrictive contour-mode resonators have been shown to be effective magnetometers by exploiting the ΔE effect. With dimensions of ~100-200 μm across and <1 μm thick, they offer high spatial resolution, portability, low power consumption, and low cost. However, a thorough understanding of the magnetic material behavior in these devices has been lacking, hindering performance optimization. This manuscript reports on the strong, nonlinear correlation observed between the frequency response of these sensors and the stress-induced curvature of the resonator plate. The resonance frequency shift caused by DC magnetic fields drops off rapidly with increasing curvature: about two orders of magnitude separate the highest and lowest frequency shift in otherwise identical devices. Similarly, an inverse correlation with the quality factor was found, suggesting a magnetic loss mechanism. The mechanical and magnetic properties are theoretically analyzed using magnetoelastic finite-element and magnetic domain-phase models. The resulting model fits the measurements well and is generally consistent with additional results from magneto-optical domain imaging. Thus, the origin of the observed behavior is identified and broader implications for the design of nano-magnetoelastic devices are derived. By fabricating a magnetoelectric nano-plate resonator with low curvature, a record-high DC magnetic field sensitivity of 5 Hz/nT is achieved.
Equivalent circuit method based on complete magneto-mechanical coupling magnetostriction parameters for fixed magnetoelectric composites

Yikun Yang,Bintang Yang

DOI: https://doi.org/10.1016/j.ijmecsci.2021.106411

IF: 7.3

2021-06-01

International Journal of Mechanical Sciences

Abstract:<p>Sensor applications based on magnetoelectric (ME) effects have the potential to achieve ultra-precise detection. Due to the significant nonlinearity found in the experiment, establishing a systematic nonlinear analysis model is essential for designing high performance ME devices. This paper presents an equivalent circuit method based on complete magneto-mechanical coupling nonlinear magnetostrictive (MS) constitutive parameters for nonlinear analysis of ends fixed ME composites. In order to accurately characterize the nonlinearity of the MS phase in ME composites, a nonlinear constitutive model considering fully magneto-mechanical coupling is employed, and nonlinear MS constitutive parameters can be derived from it. Finally, an equivalent circuit model, which can characterize the nonlinearity of ME composites, is developed. Utilizing this method, the response of ends fixed ME composites at low frequency range and around resonant frequency can be predicted. The influences of prestress, bias magnetic field and length ratio of MS phase and piezoelectric phase on the ME response are also investigated with this method. Moreover, an ends fixed ME composites is fabricated and the performance for AC/DC current is tested. The experimental results demonstrate the effectiveness of the proposed equivalent circuit model and the noise density is 6.08 nV/<span class="math"><math>Hz</math></span>. In addition, the detection accurate for AC and DC current is better than 0.4 mA and 5 mA, respectively. This research can provide theoretical basis for the optimal design of sensors and other devices based on ME composites.</p>

engineering, mechanical,mechanics
Magnetoelastic Sensor Optimization for Improving Mass Monitoring

William S Skinner,Sunny Zhang,Robert E Guldberg,Keat Ghee Ong,William S. Skinner,Robert E. Guldberg

DOI: https://doi.org/10.3390/s22030827

IF: 3.9

2022-01-22

Sensors

Abstract:Magnetoelastic sensors, typically made of magnetostrictive and magnetically-soft materials, can be fabricated from commercially available materials into a variety of shapes and sizes for their intended applications. Since these sensors are wirelessly interrogated via magnetic fields, they are good candidates for use in both research and industry, where detection of environmental parameters in closed and controlled systems is necessary. Common applications for these sensors include the investigation of physical, chemical, and biological parameters based on changes in mass loading at the sensor surface which affect the sensor’s behavior at resonance. To improve the performance of these sensors, optimization of sensor geometry, size, and detection conditions are critical to increasing their mass sensitivity and detectible range. This work focuses on investigating how the geometry of the sensor influences its resonance spectrum, including the sensor’s shape, size, and aspect ratio. In addition to these factors, heterogeneity in resonance magnitude was mapped for the sensor surface and the effect of the magnetic bias field strength on the resonance spectrum was investigated. Analysis of the results indicates that the shape of the sensor has a strong influence on the emergent resonant modes. Reducing the size of the sensor decreased the sensor’s magnitude of resonance. The aspect ratio of the sensor, along with the bias field strength, was also observed to affect the magnitude of the signal; over or under biasing and aspect ratio extremes were observed to decrease the magnitude of resonance, indicating that these parameters can be optimized for a given shape and size of magnetoelastic sensor.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
On-chip scalable optomechanical magnetometers

Bei-Bei Li,Douglas Bulla,Varun Prakash,Stefan Forstner,Ali Dehghan-Manshadi,Halina Rubinsztein-Dunlop,Scott Foster,Warwick P. Bowen

DOI: https://doi.org/10.48550/arXiv.1805.09660

2018-05-25

Abstract:The dual-resonant enhancement of mechanical and optical response in cavity optomechanical magnetometers enables precision sensing of magnetic fields. In previous working prototypes of such magnetometers, a cavity optomechanical system is functionalized by manually epoxy-bonding a grain of magnetostrictive material. While this approach allows proof-of-principle demonstrations, practical applications require more scalable and reproducible fabrication pathways. In this work, we scalably fabricate optomechanical magnetometers on a silicon chip, with reproducible performance across different devices, by sputter coating a magnetostrictive film onto high quality toroidal microresonators. Furthermore, we demonstrate that thermally annealing the sputtered film can improve the magnetometer sensitivity by a factor of 6.3. A peak sensitivity of 585 pT/Hz^1/2 is achieved, which is comparable with previously reported results using epoxy-bonding.

Applied Physics,Optics
Magnetoelectric Interactions in Layered Composites of Piezoelectric Quartz and Magnetostrictive Alloys

G. Sreenivasulu,V. M. Petrov,L. Y. Fetisov,Y. K. Fetisov,G. Srinivasan

DOI: https://doi.org/10.1103/PhysRevB.86.214405

2012-11-24

Abstract:Mechanical strain mediated magnetoelectric effects are studied in bilayers and trilayers of piezoelectric quartz and magnetostrictive permendur (P), an alloy of Fe-Co-V. It is shown that the magneto-electric voltage coefficient (MEVC), proportional to the ratio of the piezoelectric coupling coefficient to the permittivity, is higher in quart-based composites than for traditional ferroelectrics based ME composites. In bilayers of X-cut single crystal quartz and permendur, the MEVC varies from 1.5 V/cm Oe at 20 Hz to ~ 185 V/cm Oe at bending resonance or electromechanical resonance corresponding to longitudinal acoustic modes. In symmetric quartz-P trilayers, the MEVC ~ 4.8 V/cm Oe at 20 Hz and ~ 175 V/cm Oe at longitudinal acoustic resonance. A model for low-frequency and resonance ME effects is provided for theoretical estimates of MEVC and calculated MEVC are in general agreement with measured values. Magneto-electric composites with quartz have the desired characteristics such as the absence of ferroelectric hysteresis and pyroelectric losses and could potentially replace ferroelectrics in composite-based magnetic sensors, transducers and high frequency devices.

Materials Science
AlScN-based MEMS magnetoelectric sensor

Jingxiang Su,Florian Niekiel,Simon Fichtner,Lars Thormaehlen,Christine Kirchhof,Dirk Meyners,Eckhard Quandt,Bernhard Wagner,Fabian Lofink

DOI: https://doi.org/10.1063/5.0022636

IF: 4

2020-09-28

Applied Physics Letters

Abstract:MEMS sensors based on magnetoelectric composites have attracted great interest due to their capability to detect weak magnetic fields, showing high potential in applications like biomagnetic field detection and magnetic particle imaging. This paper reports on a scandium aluminum nitride thin film-based MEMS magnetoelectric sensor. The sensor consists of a polycrystalline silicon cantilever with a size of 1000 μm × 200 μm covered by a piezoelectric Al0.73Sc0.27N and a magnetostrictive (Fe90Co10)78Si12B10 thin film. The performance of the presented sensor is investigated based on the magnetoelectric (ME) voltage coefficient, voltage noise density, and limit of detection and compared to the characteristics of the aluminum nitride thin film-based ME sensor with the same layout and fabrication technology. By using an Al0.73Sc0.27N thin film with a higher piezoelectric activity instead of AlN in MEMS ME sensors, the ME voltage coefficient of (1334 ± 84) V/cm Oe in resonance is almost double, thereby lowering the requirements for the electronic system. The limit of detection of (60 ± 2) pT/Hz0.5 remains unchanged due to the dominant thermomechanical noise in resonance.

physics, applied
Multilayered magnetoelectric composites for precise and wide-range current sensing

Zhaoqiang Chu,Jianyu Cui,Yanpan Wang,ZeLin Du,MohammadJavad PourhosseiniAsl,Nini Li,Wei Dan,Xiaoyi Gao,Xianfeng Liang

DOI: https://doi.org/10.1063/5.0217772

IF: 4

2024-06-17

Applied Physics Letters

Abstract:Magnetoelectric (ME) sensors are widely studied and well suited for current condition monitoring in smart grids due to their high sensitivity, low power consumption, and compact size. However, designing ME sensors that simultaneously achieve low magnetic noise and a large linear range remains challenging. In this work, we propose and systematically study a multilayered magnetoelectric sensor (MLMS). We experimentally demonstrate that the voltage noise is effectively suppressed by connecting the piezoelectric elements of the MLMS in series. Additionally, the magnetic flux concentration effect is weakened by magnetic shielding from the outer Metglas laminates, which increases the optimized bias field to 52 Oe for the MLMS. Consequently, an equivalent magnetic noise as low as 16.7 pT/rtHz at 1 Hz is obtained and an enlarged linear range from 20 pT to 2 mT is achieved. Furthermore, we demonstrate that the proposed MLMS could linearly detect a wide range of power currents from 0.1 mA to 400 A, with nonlinear error and current resolution as low as 0.05% and 0.1 mA, respectively.

physics, applied
Out-of-Plane Cmos Compatible Magnetometers

M. El Ghorba,N. André,S. Sobieski,J. -P. Raskin,J.-P. Raskin

DOI: https://doi.org/10.48550/arXiv.0802.3077

2008-02-21

Other Computer Science

Abstract:Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-of-plane ferromagnetic nickel plate magnetometer is also presented.

DNA profiling analysis of endometrial and ovarian cell lines reveals misidentification, redundancy and contamination.

Magnetostrictive Strain Monitoring of Cement-Based Magnetoelectric Composites in A Variable Magnetic Field by Fiber Bragg Grating

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Phase Sensitivity and Phase Noise of Cantilever-Type Magnetoelastic Sensors Based on the $Δ$E Effect

High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Sensitivity and Noise Evaluation of a Bonded Magneto(elasto) Electric Laminated Sensor Based on In-Plane Magnetocapacitance Effect for Quasi-Static Magnetic Field Sensing

Low Noise Inverse Magnetoelectric Magnetic Field Sensor

Low-noise inverse magnetoelectric magnetic field sensor

Design and Analysis of A Self-Biased Broadband Magnetoelectric Cantilever Operated at Multi-Frequency Windows

Nonlinear dynamic finite element model for magnetostrictive/piezoelectric laminated composite magnetoelectric sensors

Miniature magneto-oscillatory wireless sensor for magnetic field and gradient measurements

Curvature and Stress Effects on the Performance of Contour-Mode Resonant ΔE Effect Magnetometers

Equivalent circuit method based on complete magneto-mechanical coupling magnetostriction parameters for fixed magnetoelectric composites

Magnetoelastic Sensor Optimization for Improving Mass Monitoring

On-chip scalable optomechanical magnetometers

Magnetoelectric Interactions in Layered Composites of Piezoelectric Quartz and Magnetostrictive Alloys

AlScN-based MEMS magnetoelectric sensor

Multilayered magnetoelectric composites for precise and wide-range current sensing

Out-of-Plane Cmos Compatible Magnetometers