Properties of nonthermal capacitively coupled plasmas generated in narrow quartz tubes for synthesis of silicon na-noparticles

Sanghun Song,Romain Le Picard,S. Girshick,U. Kortshagen,M. Kushner

DOI: https://doi.org/10.1109/PLASMA.2013.6634910

2013-06-16

Abstract:Results from a computational investigation of the fundamental properties of plasma synthesis of silicon nanocrystals (SNCs) using the 2-dimensional hybrid plasma equipment model (HPEM) were discussed. The model reactor comprised quartz tube excited by the two ring electrodes at 25 MHz. Most of SiH₄ dissociated in transitioning through the plasma zone. The dissociation products produced mostly Si₂H₆, SiH₃, and SiH₂ on the exit.