Silicon nanowire array fabricated with good site and size controllability

Zhishan Yuan,Yunfei Chen,Z. Ni,Hong Yi,Yuelin Wang,Tie Li
DOI: https://doi.org/10.1109/NANO.2015.7388925
2015-07-27
Abstract:Effective and universal method to fabricate site well-defined, ordered, and homogenous size SiNWs is still necessary to support SiNWs application. In this paper, a simple and cost-effective approach to synthesis site and size controlled amorphous silicon nanowires (a-SiNWs) is reported. The position of a-SiNWs array can be simply controlled by the site of micron size Cu patterns array through photolithography. While the size of a-SiNWs can be adjust by the volume of Cu pattern.
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