An ESD preotection device using normally-on MEMS switch

T. Ikehashi,Tomohiro Saito
DOI: https://doi.org/10.1109/SENSOR.2009.5285717
2009-06-21
Abstract:We investigate normally-off and normally-on MEMS switches as ESD protection devices. The normally-on type switch behaves as an ESD protection only when the system power is off. We show that the optimized normally-on switch realizes ≫4000V HBM-ESD robustness with parasitic capacitance as small as 1.8fF.
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