Fabrication of gating nanopore towards single-biomolecule electrical identification

Y. Sasaki,T. Ohshiro,S. Kawano,M. Taniguchi,T. Kawai
DOI: https://doi.org/10.1109/NANO.2012.6322152
2012-10-04
Abstract:We developed a simple fabrication method for a gating nanopore nanostructure, which is composed of a solid-state nanopore and embodied nanogap-electrode inside the nanopore. The method by using deep reactive-ion etching technique achieved a high-yield rate and easily controlled the pore-length for the gating nanopore device. In addition, by using the gating nanopore, we investigated single-particles / biomolecules that pass through a nanopore only by change in electric current not only flowing parallel to a nanopore, but also flowing between nanogap electrodes perpendicular to the nanopore. From the ionic current intensity and its time profiles, we identify a sample single-particles/bioanalytes. The electrical measurement by using gating nanopore would be a promising methodology for single-biomolecule sensors.
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