UV trimming of polarization-independent microring resonator by internal stress and temperature control.

N. Kobayashi,Tomoyuki Sato,Y. Kokubun

DOI: https://doi.org/10.1364/OE.18.000906

IF: 3.8

2010-01-18

Optics Express

Abstract:The temperature dependence of the resonant wavelength of vertically coupled microring resonator can be controlled via internal stress caused by the thermo-optic and photo-elastic effects. In the case of strong internal stress, a polarization-independent microring resonator can be realized by controlling the device surface temperature using a heater module; the temperature dependence of TE and TM polarizations are different due to the internal stress and thus manipulating temperatures, the resonant wavelengths for TE and TM can be equalized at a specific temperature. In this study, the UV trimming of polarization-independent wavelength was demonstrated using UV-sensitive SiON as a core material. The temperature dependence of TE polarization was almost athermalized and that of TM was made negative by controlling internal stress. As a result, the simultaneous realization of the UV trimming and the polarization-independent microring was made possible more easily than before; the UV trimming can be done at room temperature due to the athermalized resonant wavelength for TE polarization.