The influence of lens chromatic aberration on electron energy‐loss spectroscopy quantitative measurements

Ying-Ying Yang,R. Egerton
DOI: https://doi.org/10.1002/jemt.1070210412
1992-06-01
Abstract:An investigation has been made into the effect of chromatic aberrations of a pre‐spectrometer lens system on quantitative elemental analysis by electron energy loss spectroscopy (EELS). In transmission electron microscopy (TEM) diffraction mode, the measured effects are typically 150–330 times larger than if only objectiv‐lens chromatic aberration were important. We discuss several methods of avoiding errors arising from chromatic aberration, including selection of a suitable optical mode (dependent on the desired spatial resolution), adjustment of the TEM imaging system so as to focus the system for a chosen energy loss, and analysis of a large area of a uniform specimen. © 1992 Wiley‐Liss, Inc.
What problem does this paper attempt to address?