Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range.

Minghong Yang,A. Gatto,N. Kaiser
DOI: https://doi.org/10.1364/AO.45.000178
IF: 1.9
Applied Optics
Abstract:We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm.
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