Plasma diagnostics for unraveling process chemistry.

Joshua M. Stillahn,Kristina J. Trevino,E. R. Fisher
DOI: https://doi.org/10.1146/annurev.anchem.1.031207.112953
IF: 12.4
2008-06-13
Annual Review of Analytical Chemistry
Abstract:This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We describe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational and kinetic energies, and plasma-surface reactions. Molecule-surface interactions for MX(n) species (M = C, Si, N; X = H, F, Cl) are presented and interpreted with respect to the molecule's electronic configuration and dipole moments.
What problem does this paper attempt to address?