Abstract:Permanent magnet synchronous linear motor (PMSLM) is widely used to meet the requirement of high dynamic accuracy positioning, such as in machine tools and devices of semiconductor manufacturing. A new 2-DOF control structure is proposed in this paper to improve the dynamic performance of the positioning servo system with PMSLM. Aiming at the position tracking performance, a control algorithm based on the model predictive control (MPC) is developed with position and speed as the feedback state variables. In addition, an extended state observer (ESO) is designed for the rejection of various disturbances, which are not involved in the control model and are regarded as the lumped disturbance to be estimated and compensated by the ESO. The experimental results show that, compared with the commonly used PPI controller (proportional position controller and proportional–integral speed controller), the proposed method enhances the position bandwidth and servo stiffness effectively.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to improve the dynamic performance and anti - interference ability in the position servo system of permanent magnet synchronous linear motors (PMSLMs). Specifically, the paper proposes a new control method that combines model predictive control (MPC) and extended state observer (ESO) to improve the position tracking performance and the anti - interference ability of the system. The traditional position servo control system usually uses the cascade structure (PPI) of the proportional position controller (P) and the proportional - integral speed controller (PI), but this method has limitations in terms of bandwidth and robustness. Therefore, this paper aims to overcome these limitations and improve the dynamic response and positioning accuracy of the system by introducing MPC and ESO. ### Main problems 1. **Improve dynamic performance**: - The traditional PPI controller has an upper limit on bandwidth, which is prone to cause overshoot and oscillation. - The paper improves the dynamic response and tracking performance of the system by introducing MPC to predict future states and optimize control outputs. 2. **Enhance anti - interference ability**: - There are multiple interference factors in the system, such as load force changes, mass perturbations, and nonlinear thrust fluctuations. - The paper designs an ESO to estimate and compensate for these interferences and improve the anti - interference performance of the system. ### Solutions 1. **Model predictive control (MPC)**: - Use MPC to predict future states and optimize control outputs according to the prediction results. - Optimize the performance of MPC by adjusting the position error weight \( w_x \) and the speed error weight \( w_v \). 2. **Extended state observer (ESO)**: - Design an ESO to estimate and compensate for various interferences in the system. - Balance the anti - interference ability and system stability by adjusting the cut - off frequency \( \omega_0 \) of the ESO. ### Experimental verification - **Tracking performance**: - The experimental results show that the tracking performance of MPC is better than that of the traditional PPI controller, and the response time is significantly reduced. - After introducing the ESO, the steady - state error is eliminated, but a high cut - off frequency will cause a slight overshoot. - **Anti - interference performance**: - By applying a step - interference current, it is verified that the anti - interference performance of MPC + ESO is better than that of the PPI controller. - The ESO with a high cut - off frequency can converge faster, reducing the maximum position error and the settling time. - **Frequency - domain analysis**: - The closed - loop bandwidth increases from about 72 Hz of PPI to more than 140 Hz of MPC + ESO. - Appropriate selection of the cut - off frequency of the ESO can further optimize the performance in the mid - frequency band, but if it is too high, it will amplify the measurement noise. ### Conclusion The control method proposed in the paper effectively improves the dynamic performance and anti - interference ability of the PMSLM position servo system. Through the combination of MPC and ESO, the system performs well in terms of tracking performance and robustness and has high application potential.

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