Abstract:Rhombohedral phase HfxZr1‐xO2 (HZO, x from 0 to 1) films are promising for achieving robust ferroelectric polarisation without the need for an initial wake‐up pre‐cycling, as is normally the case for the more commonly studied orthorhombic phase. However, a large spontaneous polarisation observed in rhombohedral films is not fully understood, and there are also large discrepancies between experimental and theoretical predictions. In this work, in rhombohedral ZrO2 thin films, we show that oxygen vacancies are not only a key factor for stabilizing the phase, but they are also a source of ferroelectric polarisation in the films. This is shown experimentally through the investigation of the structural properties, chemical composition and the ferroelectric properties of the films before and after an annealing at moderate temperature (400 °C) in an oxygen environment to reduce the VO concentration compared. The experimental work is supported by density functional theory (DFT) calculations which show that the rhombohedral phase is the most stable one in highly oxygen defective ZrO2 films. The DFT calculations also show that VO contribute to the ferroelectric polarisation. Our findings reveal the importance of Vo for stabilising rhombohedral ZrO2 thin films with superior ferroelectric properties.

Ferroelectricity induced by oxygen vacancies in rhombohedral ZrO2 thin films