Abstract:This work addresses in‐plane and vertical tip‐sample junction current leakage as the fundamental sources of parasitic contrast in tomographic scanning probe microscopy (SPM), hindering real‐space 3D reconstruction. After that it proposes and demonstrates a novel strategy called adaptive scalpel SPM to mitigate this effect and significantly improve the 3D reconstructions. Controlling nanoscale tip‐induced material removal is crucial for achieving atomic‐level precision in tomographic sensing with atomic force microscopy (AFM). While advances have enabled volumetric probing of conductive features with nanometer accuracy in solid‐state devices, materials, and photovoltaics, limitations in spatial resolution and volumetric sensitivity persist. This work identifies and addresses in‐plane and vertical tip‐sample junction leakage as sources of parasitic contrast in tomographic AFM, hindering real‐space 3D reconstructions. Novel strategies are proposed to overcome these limitations. First, the contrast mechanisms analyzing nanosized conductive features are explored when confining current collection purely to in‐plane transport, thus allowing reconstruction with a reduction in the overestimation of the lateral dimensions. Furthermore, an adaptive tip‐sample biasing scheme is demonstrated for the mitigation of a class of artefacts induced by the high electric field inside the thin oxide when volumetrically reduced. This significantly enhances vertical sensitivity by approaching the intrinsic limits set by quantum tunneling processes, allowing detailed depth analysis in thin dielectrics. The effectiveness of these methods is showcased in tomographic reconstructions of conductive filaments in valence change memory, highlighting the potential for application in nanoelectronics devices and bulk materials and unlocking new limits for tomographic AFM.

Large-area high-speed scanning probe microscopy using legacy scanners

Fast Scanning Mode and Its Realization in a Scanning Acoustic Microscope

Note: Symmetric Modulation Methodology Applied In Improving The Performance Of Scanning Tunneling Microscopy

Design of Optimal Fast Scanning Trajectory for the Mechanical Scanner of Measurement Instruments

A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Design of a High-Bandwidth Tripod Scanner for High Speed Atomic Force Microscopy.

A Stitching Method for AFM Based Large Scale Scanning with High Resolution

A new type of atomic force microscope with multi-scanners

A Novel Atomic Force Microscope with High Stability and Scan Speed

Wide-Range Scanner With Hinge Mechanism And Its Application In Atomic Force Microscope

Improved accuracy and speed in scanning probe microscopy by image reconstruction from non-gridded position sensor data

Ideal Scan Path for High-Speed Atomic Force Microscopy

A Scanning Hall Probe Microscope for high resolution, large area, variable height Magnetic Field Imaging

Scanning probe microscopy of biological samples and other surfaces

High Speed Force-Volume Mapping Using Atomic Force Microscope.

High-speed scanning tunneling microscope technique and its application in studying structural dynamics on surfaces

Adaptive Scalpel Scanning Probe Microscopy for Enhanced Volumetric Sensing in Tomographic Analysis

Fast Specimen Boundary Tracking and Local Imaging with Scanning Probe Microscopy

An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

A Smoothed Raster Scanning Trajectory Based on Acceleration-Continuous B-spline Transition for High-Speed Atomic Force Microscopy