Abstract:Precision glass molding is an efficient and promising technique for large-volume micro-optical manufacturing. Even though significant progress in precision glass molding has been achieved on the anti-adhesive coating, technical challenges and barriers still exist towards tailoring the coating layer to ensure durability and long-term processing consistency in numerous molding cycles. This manuscript presents a novel molding technique utilizing micro-patterned Si mold inserts coated with a newly developed nano-graphitic carbon coating as an isolation layer in high-precision glass molding. The coating is prepared by atmospheric pressure chemical vapor deposition (APCVD), in which the liquid benzene and silicone rubber are used as the carbon source and silicon oxycarbide (SiOC) source, respectively. The nano-morphologies of the nano-graphitic carbon coating with different conditions are characterized and analyzed, illustrating notable differences in surface features with the addition of silicone rubber and various growth durations. In the demonstration, the nano-graphitic carbon-coated Si mold inserts exhibit unique properties, including anti-adhesive and hydrophobic at elevated temperatures. Two kinds of micro-patterned Si mold inserts, a micro-pillar matrix and a micro-lens array, generated by UV lithography and diamond turning, are utilized to demonstrate the feasibility of the anti-adhesive coating in precision glass molding. The obtained results indicate that the micro-optical features on the coated Si mold inserts are successfully transferred to glass substrates with high replication fidelity without notable signs of adhesion or contamination in repetitive molding cycles. This emerging technology makes Si an alternative mold material with low surface adhesion, enhances micro-optical machining efficiency, and replicates high-precision, low-cost micro-optics on large scales that were previously unavailable.

Amorphous Carbon Coated Silicon Wafer as Mold Insert for Precision Glass Molding

Amorphous Carbon Coated Silicon Wafer as Mold Insert for Precision Glass Molding

Study on nano-graphitic carbon coating on Si mold insert for precision glass molding

Micro Aspheric Glass Lens Molding Process

Compression molding of glass freeform optics using diamond machined silicon mold

Silicon-Carbide Microfabrication by Silicon Lost Molding for Glass-Press Molds

Glass Molding for Microstructures

Investigation of the effects of process parameters on the glass-to-mold sticking force during precision glass molding

Molecular dynamics study on friction property between fused silica and SiC mold in high temperature molding

Mold protective coatings for precision glass molding

Study on α-Al2O3 anti-adhesion coating for molds in precision glass molding

Improvement of adhesion properties of glass prepared using SiC-deposited graphite mold via low-temperature chemical vapor deposition

Manufacuturing Of Glass Diffractive Optical Elements By Use Of Precision Compression Molding Process

Fabrication of Vitreous Carbon Mold for Glass Moled Microarray

Studies on Protective Coatings for Molding Tools Applied in a Precision Glass Molding Process for a High Abbe Number Glass S-FPM3

Manufacturing of Glass Diffractive Optical Elements by Use of Precision Compression Molding Process

Recent advancements in optical microstructure fabrication through glass molding process

Wear of mold surfaces: Interfacial adhesion in precision glass molding

Micro-structuring of glassy carbon for precision glass molding of binary diffractive optical elements

Experiment on glass microgroove molding by using polycrystalline nickel phosphorus mold