Surface-acoustic-wave devices for signal processing applications

J. Maines,E. Paige

DOI: https://doi.org/10.1109/PROC.1976.10189

IF: 20.6

1976-05-01

Proceedings of the IEEE

Abstract:A survey of SAW devices is presented including delay lines, frequency filters, oscillators, matched filters, and Fourier transformers. Application of these devices to signal processing is discussed.

Physics,Engineering,Computer Science

What problem does this paper attempt to address?

Surface Acoustic Wave Devices for Sensor Applications

Liu Bo,Chen Xiao,Cai Hualin,Mohammad Ali Mohammad,Tian Xiangguang,Tao Luqi,Yang Yi,Ren Tianling

DOI: https://doi.org/10.1088/1674-4926/37/2/021001

2016-01-01

Journal of Semiconductors

Abstract:Surface acoustic wave(SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
Flexible Surface Acoustic Wave Devices and Its Applications in Microfluidics

University of West Scotland,He Xingli,Wang Wenbo,Hu Nana,Jin Hao,Xu Y.,Dong Shurong,Wang Demiao,Fu Y.Q.,Inst. of Renew. Energ.&Environ. Tech. Bolton University

DOI: https://doi.org/10.1557/opl.2014.33

2014-01-01

MRS Proceedings

Abstract:Flexible electronics and microsystems are an emerging technology with a tremedous impact to the future electronics and information technology and widespread applications. Various devices and microsystems have been developed. Surface acoustic wave (SAW) devices are a type of essential device for electronics, microsensors and microsystems; however there is no activity on the development of flexible SAW devices yet. This paper reports the development of flexible SAW devices on cheap, bendable and disposable plastic films. Flexible SAW devices with resonant frequency of 198.1 MHz and 447 MHz for the Rayleigh and Lamb waves respectively have been obtained with a large transmission signal up to 18dB. The flexible SAW devices have also demonstrated their ability for acoustic streaming with a velocity up to 3.4 cm/s and for particle concentration. The results have clearly demonstrated that the flexible SAW devices have great potential for applications in electronics and microsystems.
Surface Acoustic Wave Based Microfluidic Devices for Biological Applications

Xianglian Liu,Xuan Chen,Ziwei Yang,He Xia,Chuanyu Zhang,Xueyong Wei

DOI: https://doi.org/10.1039/d2sd00203e

2023-01-01

Sensors & Diagnostics

Abstract:This review chooses types of SAWs as the thread to run through various implements, and the notable set-ups and key features in each category are summarized and discussed in detail.
Method for Implementing Wavelet Transform by Using Surface Acoustic Wave Device

Peiyong Wei,Changchun Zhu,Junhua Liu,Zongping ZHANG

DOI: https://doi.org/10.3321/j.issn:0253-987X.2001.04.016

2001-01-01

Abstract:Wavelet is fabricated as pulse response of surface acoustic wave(SAW) devices which depend on the characteristics of surface acoustic wave.Fast transform of continuous dyadic wavelet is realized successfully with special analog devices.It is valuable to exploit and apply superiority of wavelet transform because of its simplicity of implemenfution and averting complex algorithm and expensive fabrication process .The example of the application of wavelet transform to detect and filter signals is given.
Research progress of wireless passive surface acoustic wave sensor

Tao YE,Hao JIN,Shu-rong DONG,De-miao WANG

DOI: https://doi.org/10.13873/J.1000-9787(2014)12-0001-04

2014-01-01

Abstract:Surface acoustic wave(SAW) sensor is a kind of wireless passive sensor,which has advantages of passive sensing and suitable for harsh environments that common sensors cannot realize.Structure characteristics and principle of SAW device are reviewed,and key technologies such as RF signal transceiver and signal processing are mainly focused on,as well as related research status in recent years home and abroad is reviewed and summary and prospect are carried out.
Acoustic wave devices based on piezoelectric/ferroelectric thin films for high-frequency communication systems and sensing applications

Yanmei Xue,Yuan Liu,Changjian Zhou,Xiu Yin Zhang

DOI: https://doi.org/10.1016/j.ceramint.2024.03.212

IF: 5.532

2024-03-01

Ceramics International

Abstract:Surface acoustic wave (SAW) and bulk acoustic wave (BAW) based radio-frequency (RF) filters dominate in handsets markets mainly because they have miniature size so multiple filters can be used but take up very small board area. Besides, due to their inherent advantages, such as low insertion loss, relatively high resonant frequency, and miniature size, their application in the physical and biochemical sensing fields has also gradually expanded. The successful implementation requires specific knowledge of acoustic wave properties, the working mechanisms, material properties, and device design. So, in this review, we survey the SAW and BAW filter technology by discussing the working principles and the comparison between the operation frequency band allocations. In addition, the approaches to enhance the performance including the selection of single crystal/ferroelectric materials for BAW and the structure design optimization for SAW are introduced with discussions for further improvement. Then, flexible SAW and BAW devices are also presented and their new application opportunities in the fields of skin-like electronics and wearable health monitoring devices can be foreseen. Finally, the potential challenges of high frequency, wide bandwidth, miniaturization, and compatibility with the integrated circuits (IC) manufacturing process are overviewed as well.

materials science, ceramics
Surface acoustic wave sensors and their applications

ZHANG Shu-Yi,ZHOU Feng-Mei,FAN Li

DOI: https://doi.org/10.3969/j.issn.1000-310X.2008.06.001

IF: 3.614

2008-01-01

Applied Acoustics

Abstract:This paper introduces briefly the structures,specifications and applications of surface acoustic wave(SAW)sensors,as well as the progresses in the related studies.The SAW sensors include Rayleigh wave,shear horizontal acoustic plate wave,Love wave and Lamb wave sensors.The application fields are classified according to the functions into physical sensors and chemical/biological sensors;the former can be performed more easi- ly,but the latter homes special functions and so needs to be studied in more details based on the practical conditions.The SAW sensors have very high sensitivity and wide applica- tions due to the velocities and phases of SAW are very sensitive to the parameter changes of environments.
Surface-Acoustic-Wave Waveguides for Radio Frequency Signal Processing

Masashi Yamagata,Ning Cao,Demis D. John,Hossein Hashemi

DOI: https://doi.org/10.1109/tmtt.2022.3222395

IF: 4.3

2023-03-11

IEEE Transactions on Microwave Theory and Techniques

Abstract:The large velocity of electromagnetic waves makes the design of waveguide structures such as couplers and delay lines at radio frequencies (RFs) prohibitively large for chip-scale implementation. In contrast, acoustic waves have velocities that are many orders of magnitude smaller. Thus, with the use of acoustic waves, RF waveguides become possible. In this article, the waveguiding of sub-1-GHz surface acoustic waves (SAWs) on 128° Y-cut lithium niobate (LiNbO3) is examined with demonstrations of straight waveguides, waveguide bends, and coupled waveguides. Furthermore, an electroacoustic variable phase shifter based on an SAW waveguide on a bonded 128° Y-cut LiNbO3 on silicon is demonstrated. Finally, an all-acoustic bidirectional RF phased array front end is demonstrated. The structures shown in this work can be implemented in commercial SAW foundries resulting in low-cost compact realizations of SAW microwave signal processing structures.

engineering, electrical & electronic
Optoelectronic Applications of Surface Acoustic Waves in Visible and Infrared Wavelengths

Dong-Qing Wang,Tian-Rui Cui,Zhen Li,Hou-Fang Liu,Yi Yang,Tian-Ling Ren

DOI: https://doi.org/10.1016/j.nxnano.2023.100004

2023-01-01

Next Nanotechnology

Abstract:With the development of surface acoustic wave (SAW) technology, SAW devices have been widely applied in various areas, especially in optoelectronics fields. Compared with traditional optoelectronic devices, SAW devices exhibit higher sensitivity and can realize passive wireless operating. Although previously reported optoelectronic applications of the SAW mainly focused on ultraviolet wavelengths, recent years have witnessed its potential in visible and infrared wavelengths. In this review, the optoelectronic devices and applications of the SAW in visible and infrared wavelengths, especially on photodetection and photoelectric modulation, are introduced in detail. The research status of these devices are analyzed emphatically, including their structures, working principles, key parameters, acoustic wave types, material compositions, and performances. Finally, the future challenges and upcoming perspectives of SAW optoelectronic applications in the visible and infrared wavelengths are discussed.
Surface Acoustic Waves (SAW) Sensors: Tone-Burst Sensing for Lab-on-a-Chip Devices

Debdyuti Mandal,Tally Bovender,Robert D. Geil,Sourav Banerjee

DOI: https://doi.org/10.3390/s24020644

IF: 3.9

2024-01-20

Sensors

Abstract:The article presents the design concept of a surface acoustic wave (SAW)-based lab-on-a-chip sensor with multifrequency and multidirectional sensitivity. The conventional SAW sensors use delay lines that suffer from multiple signal losses such as insertion, reflection, transmission losses, etc. Most delay lines are designed to transmit and receive continuous signal at a fixed frequency. Thus, the delay lines are limited to only a few features, like frequency shift and change in wave velocity, during the signal analysis. These facts lead to limited sensitivity and a lack of opportunity to utilize the multi-directional variability of the sensing platform at different frequencies. Motivated by these facts, a guided wave sensing platform that utilizes simultaneous tone burst-based excitation in multiple directions is proposed in this article. The design incorporates a five-count tone burst signal for the omnidirectional actuation. This helps the acquisition of sensitive long part of the coda wave (CW) signals from multiple directions, which is hypothesized to enhance sensitivity through improved signal analysis. In this article, the design methodology and implementation of unique tone burst interdigitated electrodes (TB-IDT) are presented. Sensing using TB-IDT enables accessing multiple frequencies simultaneously. This results in a wider frequency spectrum and allows better scope for the detection of different target analytes. The novel design process utilized guided wave analysis of the substrate, and selective directional focused interdigitated electrodes (F-IDT) were implemented. The article demonstrates computational simulation along with experimental results with validation of multifrequency and multidirectional sensing capability.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Research Progress in Thin Film Surface Acoustic Wave Devices

WANG Rui,YANG Cheng-tao,ZHANG Shu-ren,LI Jiang-xiong

DOI: https://doi.org/10.3969/j.issn.1001-2028.2008.02.003

2008-01-01

Abstract:The feature and history of the piezoelectric thin film surface acoustic wave (SAW) devices are described. And theoretic and practical developments of piezoelectric thin film SAW devices in the world are reviewed. The progress in future on SAW devices are also reviewed.
The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing

Sun An-yu,Ju Bing-feng

DOI: https://doi.org/10.4028/www.scientific.net/amr.497.151

2012-01-01

Advanced Materials Research

Abstract:This document presents an integrated detection method for the whole cycle of silicon wafer processing based on Scanning Acoustic Microscope (SAM). It can be used for thickness and chamfering measurement, surface and subsurface testing, internal defects detection and identification. A SAM system was designed for silicon processing and silicon-based devices fabrication. It has more favorable measuring accuracy and quantitative analysis ability than the traditional inspection equipments using for wafer process such as infrared detector.
Microwave Acoustic Wave Devices: Recent Advances on Architectures, Modeling, Materials, and Packaging

Amelie Hagelauer,Gernot Fattinger,Clemens Ruppel,Masanori Ueda,Ken-ya Hashimoto,A. Tag

DOI: https://doi.org/10.1109/TMTT.2018.2854160

IF: 4.3

2018-01-01

IEEE Transactions on Microwave Theory and Techniques

Abstract:This paper reviews applications of acoustic wave devices in mobile communication. After a general and historical introduction to bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given on the architectures where acoustic wave devices are applied driving the requirements on the SAW and BAW components. Following this, we discuss the progress in technology important materi...
SAW Sensor Basics on Material, Antenna, and Applications: A Review

Rupesh Kumar,Nirupama Mandal

DOI: https://doi.org/10.1109/jsen.2024.3349656

IF: 4.3

2024-03-02

IEEE Sensors Journal

Abstract:Wireless, passive, and capability to withstand harsh environment make the surface acoustic wave (SAW) sensor a very prominent and unique sensor among others. SAWs are basically mechanical waves similar to sound waves, which propagate on the top surface of the piezoelectric material. Comb-like metallic structures are deposited on the top surface of the material, called the interdigital electrode transducer (IDT), and this helps in conversion from electromagnetic (EM) wave to acoustic wave. This phenomenon is called inverse piezoelectricity. Although the SAW concept is not new, it has gained much attention in recent years because of its unique specialty when it is used as a sensor. This article discusses each and every aspect of SAW sensor, including antenna design, reader architecture, and piezoelectric substrate along with its cut direction, IDT structures, and its application in various domains. Despite having unique properties, there are certain limitations in SAW sensors. These limitations have also been discussed in this article. Finally, we have discussed the areas where research scope persists to make it more robust, versatile, and industry-oriented.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

Amelie Hagelauer,Rich Ruby,Shogo Inoue,Victor Plessky,Ken-Ya Hashimoto,Ryo Nakagawa,Jordi Verdu,Pedro de Paco,Amir Mortazawi,Gianluca Piazza,Zachary Schaffer,Ernest Ting-Ta Yen,Thomas Forster,Andreas Tag

DOI: https://doi.org/10.1109/JMW.2022.3226415

2023-01-01

IEEE Journal of Microwaves

Abstract:This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs - two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.
Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Yancheng Wang,Dai Xue,Zhaoxin Deng,Deqing Mei

DOI: https://doi.org/10.1115/1.4038675

2017-01-01

Journal of Micro and Nano-Manufacturing

Abstract:This paper develops a novel standing surface acoustic wave (SAW) device with three-pair of interdigital transducers (IDTs) to fabricate the patterned microstructure arrays with the assistance of ultraviolet (UV) polymerization. The working principle, structural design, and fabrication of the SAW device are presented. Then experimental setup was' conducted to investigate the fabrication process and method of the patterned microstructure arrays on a thin liquid polymer surface. By adjusting the input wavelength and working voltage and selecting the pairs of IDTs, several types of patterned microstructure arrays, such as linear undulate and latticed undulate with different surface morphologies, could be fabricated. Results also demonstrated that the developed SAW device with the assistance of UV polymerization is an effective method to fabricate the patterned microstructure arrays, which may have great potential in the application of biomedical and microelectronic fields.
Topological Surface Acoustic Waves

Zi-Dong Zhang,Si-Yuan Yu,Hao Ge,Ji-Qian Wang,Hong-Fei Wang,Kang-Fu Liu,Tao Wu,Cheng He,Ming-Hui Lu,Yan-Feng Chen

DOI: https://doi.org/10.1103/physrevapplied.16.044008

IF: 4.6

2021-10-07

Physical Review Applied

Abstract:Topological materials for classical waves, e.g., electromagnetic and acoustic waves, have attracted growing interest, mainly due to the robustness, low loss, and new artificial degree of freedom conferred by their boundaries. Surface acoustic waves (SAWs), as widely used information carriers of microdevice relevance, are ubiquitous in today’s wireless communication and sensing networks. Herein, we report the implementation of a SAW topological insulator based on a monolithically integrated platform. By using a miniature acoustic resonator array working tens of megahertz on a piezoelectric half-space, we successfully endow electrically pumped Rayleigh-type SAWs with the “spin-momentum locking” feature, enabling solid-state acoustic waves on the “one-dimensional interface of the two-dimensional surface on the three-dimensional volume” detour arbitrarily and pass through defects and intersections with much smaller losses than those incurred with any other solutions. These revolutionary topological SAWs may open an avenue for monolithic electronic-(photonic)-phononic circuits with ultrahigh performance and advanced functionalities in, e.g., future mobile communicating, sensing, and quantum-information processing.

physics, applied
State-of-the-art Instruments Based Upon SAW Wireless Tags, SAW Match Filters, and SAW Resonators

EG Dai

DOI: https://doi.org/10.1109/ultsym.1999.849433

1999-01-01

Abstract:A theoretical analysis for the SAW wireless tag for wireless instrumentation was proposed. Employing the developed wireless tag, a telemetry instrument was also developed. Other SAW device based systems such as SAW match filter based optical time-domain reflectometer and high Q-value SAW resonator based analytical instruments are also reported. These state-of-the-art instruments can enlarge the application scope of SAW technology.
Surface acoustic wave sensors in the bioanalytical field: recent trends and challenges

Thomas M A Gronewold

DOI: https://doi.org/10.1016/j.aca.2007.09.056

2007-11-12

Abstract:This is a comparison of the latest developments in the emerging field of surface acoustic wave (SAW) sensors. Progress has been made particularly with regard to (sub-) microstructure technology and material sciences. Improvements are displayed based on the impact on a new generation of SAW sensors working efficiently in liquid media, from modeling to the fabrication steps of the individual components. It is explained, which obstacles have to be overcome for applications to the bioanalytical field. SAW sensors are shown to be extremely useful for the analysis of both small and large molecules as well as whole cells interacting with an immobilized binding partner. The output signal gives information about the pure mass loading, intrinsic properties of bound materials, or viscoelastic effects like structural rearrangements. Different setups are shown that minimize the influence of physical bulk effects on the sensor signal, e.g. salt content and viscosity. The choice of materials which can be used for sensible surfaces are presented, enabling the development of completely new coupling chemistries. Finally, the advantages compared to other biosensor technologies are pointed out.
Research Progress in Surface Acoustic Wave Filter with Multilayer Structure

LI Jianxiong,YANG Chengtao,WANG Rui,ZHANG Shuren

DOI: https://doi.org/10.3321/j.issn:1005-023X.2007.11.004

2007-01-01

Abstract:The development of wireless communication system toward high frequency and high reliability needs that surface acoustic wave filter(SAWF)must have the characteristics of high acoustic speed,high electrome- chanical coupling coefficient,low inserting loss and high temperature stability.SAWF with multilayer structure can meet these requirements,so it draws a great attention,and great progress has been made in it.The basic structure and principle of SAWF are briefly discussed.The latest research progress in SAWF with multilayer structure is reviewed, including theoretical researches and experimental ones,and its development trend is pointed out.

Surface-acoustic-wave devices for signal processing applications

Surface Acoustic Wave Devices for Sensor Applications

Flexible Surface Acoustic Wave Devices and Its Applications in Microfluidics

Surface Acoustic Wave Based Microfluidic Devices for Biological Applications

Method for Implementing Wavelet Transform by Using Surface Acoustic Wave Device

Research progress of wireless passive surface acoustic wave sensor

Acoustic wave devices based on piezoelectric/ferroelectric thin films for high-frequency communication systems and sensing applications

Surface acoustic wave sensors and their applications

Surface-Acoustic-Wave Waveguides for Radio Frequency Signal Processing

Optoelectronic Applications of Surface Acoustic Waves in Visible and Infrared Wavelengths

Surface Acoustic Waves (SAW) Sensors: Tone-Burst Sensing for Lab-on-a-Chip Devices

Research Progress in Thin Film Surface Acoustic Wave Devices

The Acoustic Micro Integrated Detection Technique for Silicon Wafer Processing

Microwave Acoustic Wave Devices: Recent Advances on Architectures, Modeling, Materials, and Packaging

SAW Sensor Basics on Material, Antenna, and Applications: A Review

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

Patterned Microstructure Array Fabrication By Using A Novel Standing Surface Acoustic Wave Device

Topological Surface Acoustic Waves

State-of-the-art Instruments Based Upon SAW Wireless Tags, SAW Match Filters, and SAW Resonators

Surface acoustic wave sensors in the bioanalytical field: recent trends and challenges

Research Progress in Surface Acoustic Wave Filter with Multilayer Structure