Abstract:Generally, a group of sub-micron or nanometer sized optical phase shifters or modulators are used in an optical phased array (OPA) based scanner so as to selectively perturb wavefronts of outgoing laser beams. Similar to the concept of light propagation through a prism, an array of phase shifters is responsible for linearly delaying or advancing the propagating light waves. Optical phased array (OPA) systems have become an emerging technology for many applications due to the compact designs that eliminate the need for robust physical moving parts, leading to their fast response, high reliability, and low power requirements. Micromirror based OPA systems are fundamentally different than the conventional micromirror arrays that were being developed for numerous applications such as spectroscopy, digital light processing projectors, laser communication, and confocal microscopy. Those micromirror arrays provide significantly different motion types, actuation strokes, and operating speeds, due to the distinct task requirements by their target applications. Most of the previously designed conventional micromirror arrays are not suitable for high-speed laser beam steering at wide field of view due to either the large mirror sizes or the large array pitch sizes. MEMS based OPA systems generally demand narrow and tightly spaced suspended microstructures with high-aspect-ratio in lateral dimensions, rendering some significant challenges in the system design, fabrication, and integration. In addition, the scanners are required to generate hundreds to thousands of scan points along a far-field scan line which results in a large number of phase shifters in the arrays and high complexity in control.

Terahertz wave beam control using optical phased array (OPA) and array photomixer

High-precision Two-Dimensional Beam Steering with a 64-Element Optical Fiber Phased Array.

Photonic THz Beam Steering Using Fiber Chromatic Dispersion

On-chip 2D beam-steering with a liquid-crystal-tunable optical phased array

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

High-speed 2D Beam Steering Based on a Thin-Film Lithium Niobate Optical Phased Array with a Large Field of View

Fast-beam-switching optical phased array for moving objects in wireless optical communication networks

Terahertz Orbital Angular Momentum: Generation, Detection and Communication

Metasurface-based High-Speed Photonic THz OAM Communication System

Ultrafast dynamic beam steering with optical frequency comb arrays

Optical Steering of a Phased‐array Antenna Based on Fast Delay‐line Switches

Dual-Axis Beam-Steering OPA with purely Passive Phase Shifters

1-D Beam Steering with Fiber-type Optical Phased Array

Multi-Line Selective Optical Phased Array with Improved Uniformity of Radiated Beam Patterns

An Integrated Optical Beamforming Network for Two-Dimensional Phased Array Radar

Micromirror Arrays as Optical Phase Modulators for Free-Space Beam Steering

Optical phased array using phase-controlled optical frequency comb

Integrated lithium niobate optical phased array for two-dimensional beam steering

Integrated optical phased array with on-chip amplification enabling programmable beam shaping

An Optimized Scheme for Optical Phased Array Beam Steering Controlled by Wavelength

Polarization Multiplexing Silicon-Photonic Optical Phased Array for 2D Wide-Angle Optical Beam Steering