Abstract:Micromechanical and nanomechanical systems with exceptionally low dissipation rates are enabling the next-generation technologies of ultrasensitive detectors and quantum information systems. New techniques and methods for lowering the dissipation rate have in recent years been discovered and allowed for the engineering of mechanical oscillators with phononic modes that are extremely well isolated from the environment and thus possess quality factors close to and beyond 1×109 . A powerful strategy for isolating and controlling a single phononic mode is based on phononic crystal engineering. Here we propose a new method for phononic crystal engineering of nanomechanical oscillators that is based on a periodic variation of the material density. To circumvent the introduction of additional bending losses resulting from the variation of material density, the added mass constitutes an array of nanopillars in which the losses will be diluted. Using this novel technique for phononic crystal engineering, we design and fabricate corrugated mechanical oscillators with quality factors approaching 1×109 in a room temperature environment. The flexibility space of these new phononic crystals is large and further advancement can be attained through optimized phononic crystal patterning and strain engineering via topology optimization. This will allow for the engineering of mechanical membranes with quality factors beyond 1×109 at room temperature. Such extremely low mechanical dissipation rates will enable the development of radically new technologies such as quantum-limited atomic force microscopy at room temperature, ultrasensitive detectors of dark matter, spontaneous waveform collapses, gravity, and high-efficiency quantum information transducers. https://doi.org/10.1103/PhysRevX.14.011039 Published by the American Physical Society under the terms of the Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI. Published by the American Physical Society

High quality quasinormal modes of phononic crystals for quantum acoustodynamics

A phononic crystal coupled to a transmission line via an artificial atom

Acoustic Beam Splitting at Low GHz Frequencies in a Defect-Free Phononic Crystal

Universal Non-Near-Field Focus of Acoustic Waves Through High-Symmetry Quasicrystals

Acoustic diamond resonators with ultra-small mode volumes

Reconfigurable topological modes in acoustic non-Hermitian crystals

Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap

High-frequency traveling-wave phononic cavity with sub-micron wavelength

Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate

Exploring regenerative coupling in phononic crystals for room temperature quantum optomechanics

Quantum acoustic Fano interference of surface phonons

Quantum electromechanics of a hypersonic crystal

Ultracoherent Nanomechanical Resonators Based on Density Phononic Crystal Engineering

Ultra-coherent nanomechanical resonators based on density phononic crystal engineering

Engineering phonon-phonon interactions in multimode circuit quantum acousto-dynamics

Phononic crystals in superfluid thin-film helium

Defect-Free Localized Modes and Coupled-Resonator Acoustic Waveguides Constructed in Two-Dimensional Phononic Quasicrystals

Nanomechanical resonators with ultra-high-$Q$ perimeter modes

High-acoustic-index-contrast phononic circuits: numerical modeling

A quasi-mode theory of chiral phonons

Acoustic topological circuitry in square and rectangular phononic crystals