Abstract:We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm3 level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.

Faraday-Ramsey rotation measurement in a thin cell as an analogy to an atomic beam

Very large optical rotation generated by Rb vapor in a multi-pass cell

Magnetic-free Faraday Rotation in an Atomic Vapor Cell

Measurement of DC and AC electric fields inside an atomic vapor cell with wall-integrated electrodes

Vapor cell Rydberg atom electrometry with time-separated fields

Microwave electrometry with Rydberg atoms in a vapour cell using bright atomic resonances

Spin-noise spectrum of hot vapor atoms in an anti-relaxation-coated cell

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors

Cavity enhanced atomic magnetometry

Ramsey Spectroscopy of CPT Resonances on the D1 Line of Alkali Metal Atoms in Miniature Cells in the Field of Counterpropagating Waves with Opposite Circular Polarizations

Measuring non-linear Faraday rotation in cold atoms in presence of persistent transverse fields using tunable differential imaging

Rydberg Raman-Ramsey (R${}^3$) resonances in atomic vapor

Observation of Ramsey Fringes Using Stimulated Raman Transitions in a Laser-Cooled Continuous Rubidium Atomic Beam

Characterization of 87Rb MEMS vapor cells for miniature atomic magnetometers

Effect of Rydberg-atom-based sensor performance on different Rydberg atom population at one atomic-vapor cell

Characterization of <SUP>87</SUP>Rb MEMS vapor cells for miniature atomic magnetometers

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Light Narrowing over Broad Temperature Range with Paraffin-Coated Vapor Cells

Faraday rotation and ellipticity spectroscopy between excited states of Rb vapor: and

Indirect pumping of alkali-metal gases in a miniature silicon-wafer cell

Field Distortion and Optimization of a Vapor Cell in Rydberg Atom-Based Radio-Frequency Electric Field Measurement