Abstract:Gas Electron Multiplier (GEM) detectors are crucial for enabling high-resolution X-ray polarisation of astrophysical sources when coupled to custom pixel readout ASIC in Gas Pixel Detectors (GPD), as in the Imaging X-ray Polarimetry Explorer (IXPE), the Polarlight cubesat pathfinder and the PFA telescope onboard the future large enhanced X-ray Timing and Polarimetry (eXTP) Chinese mission. The R&D efforts of the IXPE collaboration have resulted in mature GPD technology. However, limitations in the classical wet-etch or laser-drilled fabrication process of GEMs motivated our exploration of alternative methods. This work focuses on investigating a plasma-based etching approach for fabricating GEM patterns at Fondazione Bruno Kessler (FBK). The objective is to improve the aspect ratio of the GEM holes, to mitigate the charging of the GEM dielectric which generates rate-dependent gain changes. Unlike the traditional wet-etch process, Reactive Ion Etching (RIE) enables more vertical etching profiles and thus better aspect ratios. Moreover, the RIE process promises to overcome non-uniformities in the GEM hole patterns which are believed to cause systemic effects in the azimuthal response of GPDs equipped with either laser-drilled or wet-etch GEMs. We present a GEM geometry with 20 micrometers in diameter and 50 micrometers pitch, accompanied by extensive characterisation (SEM and PFIB) of the structural features and aspect ratios. The collaboration with INFN Pisa and Turin enabled us to compare the electrical properties of these detectors and test their performance in their use as electron multipliers in GPDs. Although this R&D work is in its initial stages, it holds promise for enhancing the sensitivity of the IXPE mission in X-ray polarimetry measurements through GEM pattern with more vertical hole profiles.

Evidence for polyimide redeposition and possible correlation with sparks in Gas Electron Multipliers working in CF$_4$ mixtures

Gas electron multipliers with metal electrodes and their applications in detectors

Aging suppression in Multistrip Multigap Resistive Plate Chambers for high counting rate experiments

New (TH)GEM coating materials characterised using spectroscopy methods

GEMs with Double Layred Micropattern Electrodes and their Applications

Performance Studies of Aluminium-Based Gas Electron Multiplier Detector

Investigation of the stability in the performance of triple GEM detectors for High Energy Physics experiments

Secondary discharge studies in single and multi GEM structures

Aging effects in the COMPASS hybrid GEM-Micromegas pixelized detectors

Investigation on the performance of a thick ceramic gas electron multiplier

Visual investigation of possible degradation in GEM foil under test

Impact of the gas choice and the geometry on the breakdown limits in Micromegas detectors

Gas gains over 10 4 and optimisation using 55 Fe X-rays in low pressure SF 6 with a novel Multi-Mesh ThGEM for directional dark matter searches

Performances and ageing study of resistive-anodes Micromegas detectors for HL-LHC environment

Stability tests performed on the triple GEM detector built using commercially manufactured GEM foils in India

Development of innovative micropattern gaseous detectors with resistive electrodes and first results of their applications

Plasma-Based Etching Approach for GEM Detector Microfabrication at FBK for X-ray polarimetry in space

Determination of charge spread, position resolution, energy resolution and gain uniformity of Gas Electron Multipliers (GEM)