Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths

Randy A. Bartels,Ariel Paul,Hans Green,Henry C. Kapteyn,Margaret M. Murnane,Sterling Backus,Ivan P. Christov,Yanwei Liu,David Attwood,Chris Jacobsen

DOI: https://doi.org/10.1126/science.1071718

2024-03-29

Abstract:We present spatial coherence measurements of extreme-ultraviolet light generated using the process of high-harmonic upconversion of a femtosecond laser. Using a phase-matched hollow-fiber geometry, the generated beam is found to exhibit essentially full spatial coherence. The coherence of this laser-like EUV source is demonstrated by recording Gabor holograms of small objects. This work demonstrates the capability to do EUV holography using a tabletop experimental setup. Such an EUV source, with low divergence and high spatial coherence, can be used for experiments such as high-precision metrology, inspection of optical components for EUV lithography (1), and for microscopy and holography (2) with nanometer resolution. Furthermore, the short time duration of the EUV radiation (a few femtoseconds) will enable EUV microscopy and holography to be performed with ultrahigh time resolution.

Optics,Atomic Physics,Quantum Physics

What problem does this paper attempt to address?

This paper mainly discusses how to generate highly spatially coherent beams in the extreme ultraviolet (EUV) wavelength. Researchers successfully generated nearly fully spatially coherent EUV beams by using high-harmonic upconversion processes and phase-matched hollow fiber structures. The coherence of this laser-like EUV source was demonstrated by recording Gabor holograms of small objects. This work demonstrates the possibility of EUV holographic imaging in a desktop experimental setup.

The high spatial coherence and low divergence of EUV light sources are very useful for applications such as high-precision metrology, inspection of EUV lithography optical elements, nanoresolution microscopy, and holography. In addition, due to the ultrashort pulse duration of EUV radiation (a few femtoseconds), it enables ultra-high-speed time-resolved microscopy and holography with sub-nanometer resolution.

In the paper, the researchers measured the spatial coherence of EUV beams using double-pinhole interference technique and analyzed the variation of coherence with spatial changes by changing the pinhole spacing. The results showed that most of the EUV beam region maintained near-perfect spatial coherence. They also utilized this coherent EUV radiation to record Gabor holograms of near-field scanning optical microscope (NSOM) tips and water jets, demonstrating its potential in high-resolution imaging.

Overall, this paper aims to address the generation of compact, laser-like light sources with high spatial coherence in the EUV wavelength range for high-precision scientific experiments and nanoscale imaging techniques.