3D printing of hierarchical structures made of inorganic silicon-rich glass featuring self-forming nanogratings

Po-Han Huang,Shiqian Chen,Oliver Hartwig,David E. Marschner,Georg S. Duesberg,Göran Stemme,Jiantong Li,Kristinn B. Gylfason,Frank Niklaus

2024-03-26

Abstract:Hierarchical structures are abundant in nature, such as in the superhydrophobic surfaces of lotus leaves and the structural coloration of butterfly wings. They consist of ordered features across multiple size scales, and their unique properties have attracted enormous interest in wide-ranging fields, including energy storage, nanofluidics, and nanophotonics. Femtosecond lasers, capable of inducing various material modifications, have shown promise for manufacturing tailored hierarchical structures. However, existing methods such as multiphoton lithography and 3D printing using nanoparticle-filled inks typically involve polymers and suffer from high process complexity. Here, we demonstrate 3D printing of hierarchical structures in inorganic silicon-rich glass featuring self-forming nanogratings. This approach takes advantage of our finding that femtosecond laser pulses can induce simultaneous multiphoton crosslinking and self-formation of nanogratings in hydrogen silsesquioxane (HSQ). The 3D printing process combines the 3D patterning capability of multiphoton lithography and the efficient generation of periodic structures by the self-formation of nanogratings. We 3D-printed micro-supercapacitors with large surface areas and a remarkable areal capacitance of 1 mF/cm^2 at an ultrahigh scan rate of 50 V/s, thereby demonstrating the utility of our 3D printing approach for device applications in emerging fields such as energy storage.

Applied Physics,Optics

What problem does this paper attempt to address?

The paper attempts to address the problem of fabricating layered structures with self-formed nanogratings in inorganic silica-rich glass and demonstrates their potential application in micro-supercapacitors (MSC).

Specifically, the paper proposes a method of three-dimensional printing using femtosecond laser direct writing technology, which can simultaneously achieve multiphoton crosslinking and self-formed nanogratings in hydrogen silsesquioxane (HSQ) materials. This method combines the three-dimensional patterning capability of multiphoton lithography with the efficient generation of self-formed nanogratings, enabling the rapid fabrication of micro-supercapacitors with large surface areas and excellent areal capacitance performance.

Using this method, researchers successfully fabricated two different nanostructured micro-supercapacitors: one with nanogratings perpendicular to the direction of the vertical sheet structure (⊥-MSC) and the other parallel to the direction of the vertical sheet structure (∥-MSC). Experimental results show that at higher scan rates, ⊥-MSC exhibits more stable areal capacitance performance, indicating its superior performance at high scan rates. This achievement demonstrates the potential application of this 3D printing method in the field of energy storage, particularly in self-powered electronic devices.