Application of Light Field Modulation Technology in Ultrafast Laser Processing(Invited)
Chai Yuan,Yan Yuexiao,Fang Honghua,Sun Hongbo
DOI: https://doi.org/10.3788/aos241211
2024-01-01
Acta Optica Sinica
Abstract:Significance Ultrafast laser processing exhibits several key characteristics,including high processing accuracy,broad applicability to various materials,and three-dimensional non-contact processing.It holds significant potential for applications in electronics,medical devices,and scientific research.Traditional laser processing with a single focus achieves sub-wavelength resolution but may not always meet processing requirements due to limitations imposed by the optical system and Gaussian mode field.Light field modulation technology enables the alteration of the light field distribution at the focal plane by modifying the amplitude,phase,polarization,and other aspects of the laser wavefront,thus achieving specialized processing.In this review,we provide an overview of light field modulation principles,research progress,and application status.We cover non-diffractive beam processing,multifocal parallel processing,patterned light field processing,vector light field processing,and spot morphology correction while discussing the associated problems,challenges,and prospects. Process In section 2,we introduce the principles of light field modulation,including modulation processes,propagation methods,and calculation techniques.The modulation processes consist of phase modulation,amplitude modulation,and complex modulation,each with its advantages and disadvantages discussed in subsection 2.1.Subsection 2.2 presents three common propagation paths:objective focus path,spatial diffraction path,and direct projection path,as illustrated in Fig.1.The main diffraction processes differ among these paths,affecting calculation complexity and capacity usage.In subsection 2.3,we discuss several calculation methods for holographic phase and amplitude,including iterative calculation,forward modeling,and deep learning algorithms.We also introduce a closed-loop feedback method proposed to optimize phase,addressing practical issues like optical system aberrations and optical axis alignment errors.Section 3,the core chapter,focuses on research progress in non-diffractive beam processing,multifocal parallel processing,patterned light field processing,vector light field processing,and spot morphology correction.We examine how light field modulation technology optimizes focal spot morphology,machining accuracy,and processing efficiency.Subsection 3.1 introduces non-diffractive beams,including Bessel beams,needle-shaped beams,and Airy beams.Bessel beams,known for their light intensity invariance and self-reconstruction,are widely used in laser perforation,cutting,and two-photon polymerization.By adjusting the aspect ratio,suppressing side lobes,and selecting appropriate laser parameters,we enhance Bessel beam processing quality(Fig.2).Needle-shaped beams(Fig.3)and Airy beams(Fig.4)offer unique performance due to their specific light field distribution.Subsection 3.2 discusses the multifocal arrays generated by light field modulation technology,which significantly improves processing efficiency.Besides,we compare focus uniformity,spacing,quantity,design flexibility,and application across two multifocal holographic phase calculation methods:iterative calculation(Fig.5)and forward modeling(Fig.6).The processing efficiency can be further improved by directly generating a patterned light field for processing through light field modulation technology.Therefore,subsection 3.3 focuses on the design and optimization methods for flat-top beams(Fig.7)and other two-dimensional or even three-dimensional light fields(Figs.8 and 9).We analyze the advantages and limitations of patterned light fields and address the practical issues that need attention during processing.Section 3.4 introduces several typical vector light field modulation methods and their applications in laser processing,emphasizing improvements in processing efficiency and resolution,as demonstrated in Figs.10 and 11.In subsection 3.5,we introduce the application of light field modulation technology for spot topography correction,which compensates for defocusing caused by the refractive index mismatch of the laser passing through the dielectric surface(Fig.12).Additionally,we cover the use of time-spatial modulation technology in spot topography correction(Fig.13). Conclusions and Prospects Light field modulation technology enhances processing accuracy and efficiency compared to traditional single-point laser processing.With the continued exploration of laser processing principles and innovations in modulation technology,new opportunities and challenges arise.Further research is needed to fully leverage the advantages of light field modulation technology and overcome current limitations in laser processing.