Metasurface lens that is converging or diverging depending on transmission direction enables ultra-compact MEMS tunable reflective lens

Firehun Dullo,Jesil Jose,Gregory Bouquet,Zeljko Skokic,Christopher Dirdal

2024-02-05

Abstract:A conventional refractive lens surface can act as a positive (converging) or negative (diverging) lens, but the same surface cannot act as both. We show that a geometric phase metasurface lens can have the unique property of acting both as a positive or negative lens upon transmission through its front or rear side, respectively. This offers certain freedom in compound lens design, where one combines focusing and defocusing operations. We utilize this property to make an ultra-compact, varifocal reflective lens, where a metasurface is placed in front of a novel long-stroke piezoelectric MEMS-micromirror. A large theoretical diopter tunability of 6330 m$^{-1}$ is enabled due to innovative thin-film piezoelectric MEMS design, offering 62 $\mu$m displacement at 40V and low power, along with rapid actuation in the kHz region. The achieved MEMS-displacement is an order of magnitude larger than previously reported out-of-plane mechanical metasurface actuation. Since both metasurface and micromirror are flat, the presented reflective lens can be assembled without need for a spacer. It is therefore well suited for wafer-level silicon fabrication at high volumes and low cost. A proof-of-concept implementation using a 1550nm NIR metalens is demonstrated, attaining on the order of 1121 m$^{-1}$ diopter change for a focal length shift of 270 $\mu$m caused by a 53 $\mu$m micromirror displacement.

Optics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to design a metasurface lens that can selectively converge or diverge light according to the direction of light transmission, and combine the long - stroke piezoelectric micro - electro - mechanical system (MEMS) technology to realize an ultra - compact, adjustable - focus reflective lens. Specifically, the paper has solved the following key problems:

1. **Functional limitations of traditional lenses**: Traditional refractive lenses can only converge or diverge light in a single direction and cannot simultaneously achieve these two functions on the same surface. The paper proposes a geometric - phase metasurface lens. This lens can selectively converge or diverge light depending on which side the light passes through.

2. **Design of compact adjustable - focus lenses**: Traditional adjustable - focus lenses are usually large in volume and require complex mechanical structures to change the focal length. The paper proposes a scheme that combines a metasurface lens and a long - stroke piezoelectric MEMS micromirror, realizing an ultra - compact adjustable - focus reflective lens. This design is not only small in size but also has a fast response speed and low power consumption.

3. **Increasing the focusing range**: By optimizing the design of the metasurface lens and the driving method of the piezoelectric MEMS micromirror, the paper has achieved a larger focusing range than existing technologies. Specifically, the paper shows that under a voltage of 40V, the MEMS micromirror can achieve a displacement of 62 μm, thereby achieving a focusing ability of up to 6330 m⁻¹.

4. **Simplifying the manufacturing process**: Since both the metasurface lens and the MEMS micromirror are planar structures, they can be mass - produced using a silicon - wafer - level manufacturing process, reducing costs and increasing production efficiency.

### Specific solutions

- **Geometric - phase metasurface lens**: Using the principle of geometric phase (Pancharatnam - Berry phase), a metasurface lens that can converge and diverge light in different directions respectively is designed. The structural units of this lens have reflection symmetry and are arranged according to a circular - symmetric phase function.

- **Long - stroke piezoelectric MEMS micromirror**: A long - stroke MEMS micromirror based on thin - film piezoelectric material (PZT) is developed, which can achieve a displacement of 62 μm under a voltage of 40V. The displacement range of this micromirror is one order of magnitude higher than that of existing electrostatic and piezoelectric driving methods.

- **Ultra - compact reflective lens design**: By combining the geometric - phase metasurface lens with the long - stroke piezoelectric MEMS micromirror, an ultra - compact reflective lens is designed. This lens has different optical behaviors in different directions and can be assembled without using spacers, which is suitable for large - scale silicon - wafer - level manufacturing.

### Experimental verification

The paper verifies the effectiveness of the above - mentioned design schemes through experiments. The experimental results show that the designed ultra - compact reflective lens can achieve the expected focusing and defocusing effects under different lens - micromirror distances, and the focusing range has reached the level predicted by theory.

In conclusion, through the innovative metasurface lens design and long - stroke piezoelectric MEMS technology, this paper has successfully solved the limitations of traditional lenses in terms of function, volume, and focusing range, providing new solutions for the miniaturization and high - performance of optical systems.