Abstract:Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, they must be validated against experiments. In this work, such an experimental validation is performed for a 1d3v particle-in-cell simulation complemented with the Monte Carlo treatment of collision processes of a capacitively coupled radio frequency plasma driven at 13.56 MHz and operated in neon gas. In a geometrically symmetric reactor the electron density in the discharge center and the spatio-temporal distribution of the electron impact excitation rate from the ground into the Ne 2p$_1$ state are measured by a microwave cutoff probe and phase resolved optical emission spectroscopy, respectively. The measurements are conducted for electrode gaps between 50 mm and 90 mm, neutral gas pressures between 20 mTorr and 50 mTorr, and peak-to-peak values of the driving voltage waveform between 250 V and 650 V. Simulations are performed under identical discharge conditions. In the simulations, various combinations of surface coefficients characterising the interactions of electrons and heavy particles with the anodized aluminium electrode surfaces are adopted. We find, that the simulations using a constant effective heavy particle induced secondary electron emission coefficient of 0.3 and a realistic electron-surface interaction model (which considers energy-dependent and material specific elastic and inelastic electron reflection, as well as the emission of true secondary electrons from the surface) yield results which are in good quantitative agreement with the experimental data.

Improving accuracy of field work calculations for the analysis of the electron acceleration mechanisms in near-critical density plasma

Scattered field formalism in the particle-in-cell method for plasma acceleration in tightly focused ultrashort laser beams

Performance improvement of particle-in-cell method for numerical modelling of open magnetic system

Correction of Particle-Moving Algorithm for Particle-in-cell Simulation of Plasma

An arbitrary order time-stepping algorithm for tracking particles in inhomogeneous magnetic fields

Importance of accurate consideration of the electron inertia in hybrid-kinetic simulations of collisionless plasma turbulence: 1. The 2D limit

Highly-efficient electron ponderomotive acceleration in underdense plasmas

Particle simulation of collision dynamics for ion beam injection into a rarefied gas

Accuracy of the Explicit Energy-Conserving Particle-in-Cell Method for Under-resolved Simulations of Capacitively Coupled Plasma Discharges

Eliminating poor statistics in Monte-Carlo simulations of fast-ion losses to plasma-facing components and detectors

Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas

Influence of Plasma Fluctuation on the Electronic Structures and Electron Collisional Excitation and Ionization Processes

Particle-based simulation of atom and ion transport in HiPIMS: effect of the plasma potential distribution on the ionized flux fraction

Improved numerical simulation model for nuclear reaction rate calculations in high-speed plasma collisions

Controlled Electron Acceleration in the Bubble Regime by Optimizing Plasma Density

Electron Acceleration in Combined Intense Laser Fields and Self-Consistent Quasistatic Fields in Plasma

Modeling of Beam-Ionized Sources for Plasma Accelerators

Cross-Filament Stochastic Acceleration of Electrons in Kilojoule Picosecond Laser Interactions with Near Critical Density Plasmas

High-order Implicit Particle-in-cell Method for Plasma Simulations at Solid Densities.

Reduction Of Numerical Errors In The Simulation Of Field-Particle Interaction Problems Using The TLM Algorithm