Fabrication of a completely transparent and highly flexible ITO nanoparticle electrode at room temperature

Jungheum Yun,Yeon Hyun Park,Tae-Sung Bae,Sunghun Lee,Gun-Hwan Lee
DOI: https://doi.org/10.1021/am302341p
Abstract:We report the fabrication of a highly flexible indium tin oxide (ITO) electrode that is completely transparent to light in the visible spectrum. The electrode was fabricated via the formation of a novel ITO nanoarray structure, consisting of discrete globular ITO nanoparticles superimposed on an agglomerated ITO layer, on a heat-sensitive polymer substrate. The ITO nanoarray spontaneously assembled on the surface of the polymer substrate by a simple sputter coating at room temperature, without nanolithographic or solution-based assembly processes being required. The ITO nanoarray exhibited a resistivity of approximately 2.3 × 10(-3) Ω cm and a specular transmission of about 99% at 550 nm, surpassing all previously reported values of these parameters in the case of transparent porous ITO electrodes synthesized via solution-based processes at elevated temperatures. This novel nanoarray structure and its fabrication methodology can be used for coating large-area transparent electrodes on heat-sensitive polymer substrates, a goal unrealizable through currently available solution-based fabrication methods.
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