Abstract:Abstract Laser processing implies the generation of a material function defined by the shape and the size of the induced structures, being a collective effect of topography, morphology, and structural arrangement. A fundamental dimensional limit in laser processing is set by optical diffraction. Many material functions are yet defined at the micron scale, and laser microprocessing has become a mainstream development trend. Consequently, laser microscale applications have evolved significantly and developed into an industrial grade technology. New opportunities will nevertheless emerge from accessing the nanoscale. Advances in ultrafast laser processing technologies can enable unprecedented resolutions and processed feature sizes, with the prospect to bypass optical and thermal limits. We will review here the mechanisms of laser processing on extreme scales and the optical and material concepts allowing us to confine the energy beyond the optical limits. We will discuss direct focusing approaches, where the use of nonlinear and near-field effects has demonstrated strong capabilities for light confinement. We will argue that the control of material hydrodynamic response is the key to achieve ultimate resolution in laser processing. A specific structuring process couples both optical and material effects, the process of self-organization. We will discuss the newest results in surface and volume self-organization, indicating the dynamic interplay between light and matter evolution. Micron-sized and nanosized features can be combined into novel architectures and arrangements. We equally underline a new dimensional domain in processing accessible now using laser radiation, the sub-100-nm feature size. Potential application fields will be indicated as the structuring sizes approach the effective mean free path of transport phenomena.

Probing laser-driven structure formation at extreme scales in space and time

In-situ observation of the formation of laser-induced periodic surface structures with extreme spatial and temporal resolution

Real-space observation of surface structuring induced by ultra-fast-laser illumination far below the melting threshold

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Nanoscale subsurface dynamics of solids upon high-intensity laser irradiation observed by femtosecond grazing-incidence x-ray scattering

Key role of surface plasmon polaritons in generation of periodic surface structures following single-pulse laser irradiation of a gold step edge

Periodic Surface Structures on Dielectrics Upon Femtosecond Laser Pulses Irradiation.

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Optical near fields for ablation of periodic structures

Maxwell Meets Marangoni—A Review of Theories on Laser‐Induced Periodic Surface Structures

Probing light by matter: Implications of complex illumination on ultrafast structuring

Tailoring Sub-micrometer Periodic Surface Structures via Ultrashort Pulsed Direct Laser Interference Patterning

Real-time in Situ Study of Femtosecond-Laser-induced Periodic Structures on Metals by Linear and Nonlinear Optics.

Large-area fabrication of low- and high-spatial-frequency laser-induced periodic surface structures on carbon fibers

Advances in ultrafast laser structuring of materials at the nanoscale

Ultrafast laser-induced morphological transformations

(Sub-)picosecond surface correlations of femtosecond laser excited Al-coated multilayers observed by grazing-incidence x-ray scattering

Unraveling the formation dynamics of metallic femtosecond laser induced periodic surface structures

Laser Etching Processes : Towards Sub-Picosecond X-UV Irradiation

Uniformity Control of Laser-Induced Periodic Surface Structures