Abstract:Free-space modulation of light is crucial for many applications, from light detection and ranging to virtual or augmented reality. Traditional means of modulating free-space light involves spatial light modulators based on liquid crystals and microelectromechanical systems, which are bulky, have large pixel areas (~10 micron x 10 micron), and require high driving voltage. Recent progress in meta-optics has shown promise to circumvent some of the limitations. By integrating active materials with sub-wavelength pixels in a meta-optic, the power consumption can be dramatically reduced while achieving a faster speed. However, these reconfiguration methods are volatile and hence require constant application of control signals, leading to phase jitter and crosstalk. Additionally, to control a large number of pixels, it is essential to implement a memory within each pixel to have a tractable number of control signals. Here, we develop a device with nonvolatile, electrically programmable, phase-only modulation of free-space infrared radiation in transmission using the low-loss phase-change material (PCM) Sb2Se3. By coupling an ultra-thin PCM layer to a high quality (Q)-factor (Q~406) diatomic metasurface, we demonstrate a phase-only modulation of ~0.25pi (~0.2pi) in simulation (experiment), ten times larger than a bare PCM layer of the same thickness. The device shows excellent endurance over 1,000 switching cycles. We then advance the device geometry, to enable independent control of 17 meta-molecules, achieving ten deterministic resonance levels with a 2pi phase shift. By independently controlling the phase delay of pixels, we further show tunable far-field beam shaping. Our work paves the way to realizing non-volatile transmissive phase-only spatial light modulators.

Hybrid silicon-organic Huygens' metasurface for phase modulation

Hybrid Bilayer Plasmonic Metasurface Efficiently Manipulates Visible Light

Completely Spin-Decoupled Dual-Phase Hybrid Metasurfaces for Arbitrary Wavefront Control

Dynamic Transmissive Metasurface for Broadband Phase‐Only Modulation Based on Phase‐Change Materials

Wavefront shaping and modulation with resonant electro-optic phase gradient metasurfaces

All-Dielectric Silicon/Phase-Change Optical Metasurfaces with Independent and Reconfigurable Control of Resonant Modes

Electrically Tunable Reflective Metasurfaces with Continuous and Full Phase Modulation for High-efficiency Wavefront Control at Visible Frequencies

Programmable wavefront control in the visible spectrum using low‐loss chalcogenide phase change metasurfaces

Design of an Electro-Optic Modulator Based on a Silicon-Plasmonic Hybrid Phase Shifter

High-efficiency light-wave control with all-dielectric optical Huygens' metasurfaces

Flexible terahertz phase modulation profile via all-silicon metasurfaces

High-speed metasurface modulator using critically coupled bimodal plasmonic resonance

> 2π Phase Modulation using Exciton-Polaritons in a Two-Dimensional Superlattice

Programmable plasmonic phase modulation of free-space wavefronts at gigahertz rates

Metasurface-Based Optical Liquid Crystal Cell as an Ultrathin Spatial Phase Modulator for THz Applications

Tunable wavefront control in the visible spectrum using low-loss chalcogenide phase change metasurfaces

Electro-optic spatial light modulator from an engineered organic layer

Non-volatile Phase-only Transmissive Spatial Light Modulators

Electrically driven programmable phase-change meta-switch reaching 80% efficiency

Efficient frequency conversion with geometric phase control in optical metasurfaces

All-dielectric metasurfaces capable of dual-channel complex amplitude modulation