Abstract:The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continues to grow, the need for stringent fabrication tolerances becomes increasingly critical. Utilizing advanced industrial fabrication processes could facilitate the necessary level of fabrication control to support the continued scaling of quantum processors. However, these industrial processes are currently not optimized to produce high coherence devices, nor are they a priori compatible with the commonly used approaches to make superconducting qubits. In this work, we demonstrate for the first time superconducting transmon qubits manufactured in a 300 mm CMOS pilot line, using industrial fabrication methods, with resulting relaxation and coherence times already exceeding 100 microseconds. We show across-wafer, large-scale statistics studies of coherence, yield, variability, and aging that confirm the validity of our approach. The presented industry-scale fabrication process, using exclusively optical lithography and reactive ion etching, shows performance and yield similar to the conventional laboratory-style techniques utilizing metal lift-off, angled evaporation, and electron-beam writing. Moreover, it offers potential for further upscaling by including three-dimensional integration and additional process optimization using advanced metrology and judicious choice of processing parameters and splits. This result marks the advent of more reliable, large-scale, truly CMOS-compatible fabrication of superconducting quantum computing processors.

Surpassing millisecond coherence times in on-chip superconducting quantum memories by optimizing materials, processes, and circuit design

Superconducting quantum memory with a suspended coaxial resonator

New material platform for superconducting transmon qubits with coherence times exceeding 0.3 milliseconds

Superconducting cavity qubit with tens of milliseconds single-photon coherence time

Mechanically induced correlated errors on superconducting qubits with relaxation times exceeding 0.4 ms

A mechanical quantum memory for microwave photons

Methods to achieve near-millisecond energy relaxation and dephasing times for a superconducting transmon qubit

Reaching 10 Ms Single Photon Lifetimes for Superconducting Aluminum Cavities

On-Demand Storage and Retrieval of Microwave Photons Using a Superconducting Multiresonator Quantum Memory

Single ion qubit with estimated coherence time exceeding one hour

Towards Realizing a Quantum Memory for a Superconducting Qubit: Storage and Retrieval of Quantum States.

Advancements in Superconducting Microwave Cavities and Qubits for Quantum Information Systems

Towards practical quantum computers: transmon qubit with a lifetime approaching 0.5 milliseconds

High-coherence superconducting qubits made using industry-standard, advanced semiconductor manufacturing

Microscopic relaxation channels in materials for superconducting qubits

Engineering high-coherence superconducting qubits

Proposal for Quantum Memory Miniaturization in Superconducting Circuit QED

Superconducting microwave cavities and qubits for quantum information systems

Progress in Superconducting Qubits from the Perspective of Coherence and Readout

Building Blocks of a Flip-Chip Integrated Superconducting Quantum Processor