Machine learning for advancing low-temperature plasma modeling and simulation

Jan Trieschmann,Luca Vialetto,Tobias Gergs
2023-12-15
Abstract:Machine learning has had an enormous impact in many scientific disciplines. Also in the field of low-temperature plasma modeling and simulation it has attracted significant interest within the past years. Whereas its application should be carefully assessed in general, many aspects of plasma modeling and simulation have benefited substantially from recent developments within the field of machine learning and data-driven modeling. In this survey, we approach two main objectives: (a) We review the state-of-the-art focusing on approaches to low-temperature plasma modeling and simulation. By dividing our survey into plasma physics, plasma chemistry, plasma-surface interactions, and plasma process control, we aim to extensively discuss relevant examples from literature. (b) We provide a perspective of potential advances to plasma science and technology. We specifically elaborate on advances possibly enabled by adaptation from other scientific disciplines. We argue that not only the known unknowns, but also unknown unknowns may be discovered due to the inherent propensity of data-driven methods to spotlight hidden patterns in data.
Plasma Physics,Machine Learning
What problem does this paper attempt to address?
The paper primarily explores the application and progress of machine learning in the field of modeling and simulation of Low-Temperature Plasmas (LTPs). Specifically, the paper aims to achieve the following two objectives: 1. **Review the Current Status**: Focus on the modeling and simulation methods of low-temperature plasmas and discuss typical examples in the related literature in detail. This part is divided into four sections by theme: plasma physics, plasma chemistry, plasma-surface interactions, and plasma process control. 2. **Look to the Future**: Based on current research results, explore the potential advancements that machine learning may bring to plasma science and technology. Special attention is given to how methods and techniques borrowed from other disciplines can promote the development of plasma research, and it is pointed out that data-driven methods can reveal patterns hidden in the data, thereby discovering unknown knowledge. ### Overview of the Paper - **Introduction**: Introduces the basic concepts of low-temperature plasmas and their importance in industrial applications such as semiconductor manufacturing. It then briefly reviews the application background and development trends of technologies such as machine learning (ML), deep learning (DL), and artificial neural networks (ANNs) in plasma research. - **Plasma Physics**: Discusses the application of data-driven methods in describing plasma discharge characteristics, including different approaches such as data-driven submodel construction, surrogate model construction, and physics-informed machine learning. - **Plasma Chemistry**: Focuses on the application of machine learning in extracting collision cross-sections and reaction rate coefficients, deriving simplified reaction mechanisms, and applications in chemical engineering. - **Plasma-Surface Interactions**: Although this part was not mentioned in the problem, the original text involves data-driven research on plasma-surface interactions. - **Process Control and Design**: Discusses the application of machine learning in plasma process control and optimization, including techniques such as model predictive control. Through these contents, the paper not only summarizes the current application of machine learning in low-temperature plasma research but also looks forward to future research directions, emphasizing the important role of data-driven methods in revealing hidden patterns in complex systems.