Fabrication of Nb and MoGe SQUID-on-tip probes by magnetron sputtering

G. Romagnoli,E. Marchiori,K. Bagani,M. Poggio

DOI: https://doi.org/10.1063/5.0150222

2023-03-13

Abstract:We demonstrate the fabrication of scanning superconducting quantum interference devices (SQUIDs) on the apex of sharp quartz scanning probes -- known as SQUID-on-tip probes -- using conventional magnetron sputtering. We produce and characterize SQUID-on-tips made of both Nb and MoGe with effective diameters ranging from 50 to 80 nm, magnetic flux noise down to \SI{300}{\nano\Phi_{0}/\sqrt{\hertz}}, and operating fields as high as \SI{2.5}{\tesla}. Compared to the SQUID-on-tip fabrication techniques used until now, including thermal evaporation and collimated sputtering, this simplified method facilitates experimentation with different materials, potentially expanding the functionality and operating conditions of these sensitive nanometer-scale scanning probes.

Superconductivity,Mesoscale and Nanoscale Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to simplify the manufacturing process of scanning superconducting quantum interference device (SQUID) probes, especially SQUID - on - tip probes, in order to achieve higher - performance nano - scale magnetic imaging. Specifically, the paper demonstrates a method of using the traditional magnetron sputtering technique to fabricate SQUID - on - tip probes made of Nb (niobium) and MoGe (molybdenum - germanium alloy) materials. This method is simpler compared to previous thermal evaporation and directional sputtering techniques, can promote experiments with different materials, and may expand the functions and operating conditions of these sensitive nano - scale scanning probes.

The main challenges mentioned in the paper include:
1. **Material Selection and Stability**: Early SQUID - on - tip probes mainly used single - element superconducting materials that are easily oxidized (such as Pb, In, Sn), which limits their stability and service life under environmental conditions.
2. **Complexity of the Manufacturing Process**: Previous techniques such as thermal evaporation and directional sputtering can fabricate high - performance SQUID - on - tip probes, but the processes are complex and difficult to be applied on a large scale.
3. **Performance Optimization**: How to improve the magnetic flux noise level, the operating magnetic field strength, and the spatial resolution of SQUID - on - tip probes by improving the manufacturing process.

The new method proposed in the paper realizes a directional deposition process by designing special deposition fixtures and using grooved quartz capillaries, thereby simplifying the manufacturing process, improving the quality of thin films, and allowing the exploration of more types of superconducting materials for the fabrication of SQUID - on - tip probes. Eventually, this method successfully prepared Nb and MoGe SQUID - on - tip probes with a diameter of less than 100 nanometers, a magnetic flux noise as low as 300 nΦ_0/√Hz, and the ability to work in a magnetic field as high as 2.5 Tesla. These probes show good stability under environmental conditions and are easy to operate and install.