Abstract:The increasing demand on precision and throughput within high-precision mechatronics industries requires a new generation of feedforward controllers with higher accuracy than existing, physics-based feedforward controllers. As neural networks are universal approximators, they can in principle yield feedforward controllers with a higher accuracy, but suffer from bad extrapolation outside the training data set, which makes them unsafe for implementation in industry. Motivated by this, we develop a novel physics-guided neural network (PGNN) architecture that structurally merges a physics-based layer and a black-box neural layer in a single model. The parameters of the two layers are simultaneously identified, while a novel regularization cost function is used to prevent competition among layers and to preserve consistency of the physics-based parameters. Moreover, in order to ensure stability of PGNN feedforward controllers, we develop sufficient conditions for analyzing or imposing (during training) input-to-state stability of PGNNs, based on novel, less conservative Lipschitz bounds for neural networks. The developed PGNN feedforward control framework is validated on a real-life, high-precision industrial linear motor used in lithography machines, where it reaches a factor 2 improvement with respect to physics-based mass-friction feedforward and it significantly outperforms alternative neural network based feedforward controllers.

What problem does this paper attempt to address?

The paper primarily addresses the issue of feedforward control in high-precision electromechanical systems and proposes a new solution. Specifically, the core problem of the research is to develop a new method that can improve the accuracy of feedforward controllers while ensuring their safety and stability in practical industrial applications. The authors point out that the demand for accuracy and throughput in current high-precision electromechanical systems is increasing, and traditional feedforward controllers based on physical knowledge can no longer meet the requirements. Neural networks, due to their strong generalization capabilities, have become a potential choice for improving the accuracy of feedforward controllers. However, directly using neural networks as black-box models can lead to poor extrapolation performance outside the training dataset, which is unacceptable in high-precision electromechanical systems as it may result in unsafe outcomes. To address this issue, the paper proposes a Physics-Guided Neural Network (PGNN) architecture. PGNN combines a physics-based layer and a black-box neural network layer by simultaneously identifying the parameters of both layers and using a novel regularization cost function to prevent competition between the layers and maintain the consistency of physical parameters. Additionally, to ensure the stability of the PGNN feedforward controller, the authors developed sufficient conditions based on improved Lipschitz boundary analysis or imposed input-to-state stability. The main contributions of the paper can be summarized as follows: 1. **Novel PGNN Architecture**: Structurally integrates a physics-based layer and a black-box neural layer to leverage both the accuracy of the physical model and the flexibility of the neural network. 2. **Regularization Cost Function**: Designed a new regularization term to avoid competition between different layers and maintain the interpretability of physical parameters. 3. **Stability Assurance**: Provided sufficient conditions for analyzing and imposing input-to-state stability of the PGNN feedforward controller, which is a key requirement for neural network-based feedforward control in practical applications. 4. **Experimental Validation**: Experiments on a real industrial linear motor demonstrated that the proposed PGNN feedforward controller improved performance by 2 times compared to the physics-based feedforward controller and showed better accuracy and extrapolation capability compared to other neural network methods. In summary, this research aims to resolve the contradiction between accuracy and safety in feedforward control of high-precision electromechanical systems by combining the advantages of physical models and neural networks, proposing a more reliable and efficient solution.

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