Abstract:A central challenge in developing quantum computers and long-range quantum networks is the distribution of entanglement across many individually controllable qubits1. Colour centres in diamond have emerged as leading solid-state 'artificial atom' qubits2,3 because they enable on-demand remote entanglement4, coherent control of over ten ancillae qubits with minute-long coherence times5 and memory-enhanced quantum communication6. A critical next step is to integrate large numbers of artificial atoms with photonic architectures to enable large-scale quantum information processing systems. So far, these efforts have been stymied by qubit inhomogeneities, low device yield and complex device requirements. Here we introduce a process for the high-yield heterogeneous integration of 'quantum microchiplets'—diamond waveguide arrays containing highly coherent colour centres—on a photonic integrated circuit (PIC). We use this process to realize a 128-channel, defect-free array of germanium-vacancy and silicon-vacancy colour centres in an aluminium nitride PIC. Photoluminescence spectroscopy reveals long-term, stable and narrow average optical linewidths of 54 megahertz (146 megahertz) for germanium-vacancy (silicon-vacancy) emitters, close to the lifetime-limited linewidth of 32 megahertz (93 megahertz). We show that inhomogeneities of individual colour centre optical transitions can be compensated in situ by integrated tuning over 50 gigahertz without linewidth degradation. The ability to assemble large numbers of nearly indistinguishable and tunable artificial atoms into phase-stable PICs marks a key step towards multiplexed quantum repeaters7,8 and general-purpose quantum processors9–12. An approach for integrating a large number of solid-state qubits on a photonic integrated circuit is used to construct a 128-channel artificial atom chip containing diamond quantum emitters.

Modular chip-integrated photonic control of artificial atoms in diamond nanostructures

Large-scale integration of artificial atoms in hybrid photonic circuits

Composite Picosecond Control of Atomic States Through a Nanofiber Interface

Integrated Electro-Optic Control of Biphoton Generation Using Hybrid Photonics

An integrated photonic engine for programmable atomic control

Nanoelectromechanical control of spin-photon interfaces in a hybrid quantum system on chip

Integrated optomechanics and single-photon detection in diamond photonic integrated circuits

Multiplexed control of spin quantum memories in a photonic circuit

Integrated diamond networks for quantum nanophotonics

Efficient Photonic Integration of Diamond Color Centers and Thin-Film Lithium Niobate

An integrated diamond nanophotonics platform for quantum-optical networks

Heterogeneous integration of spin-photon interfaces with a scalable CMOS platform

A scalable cavity-based spin-photon interface in a photonic integrated circuit

Heterogeneous integration of spin–photon interfaces with a CMOS platform

Heterogeneous integration of solid state quantum systems with a foundry photonics platform

Diamond Integrated Quantum Photonics: A Review

An integrated atom array -- nanophotonic chip platform with background-free imaging

Electro-optic Routing of Photons from a Single Quantum Dot in Photonic Integrated Circuits

Coherent spin control of a nanocavity-enhanced qubit in diamond

Electro-optic routing of photons from single quantum dots in photonic integrated circuits