A terahertz meta-sensor array for 2D strain mapping

Xueguang Lu,Feilong Zhang,Liguo Zhu,Shan Peng,Jiazhen Yan,Qiwu Shi,Kefan Chen,Xue Chang,Hongfu Zhu,Cheng Zhang,Wanxia Huang,Qiang Cheng

DOI: https://doi.org/10.1038/s41467-024-47474-3

IF: 16.6

2024-04-11

Nature Communications

Abstract:Abstract Large-scale stretchable strain sensor arrays capable of mapping two-dimensional strain distributions have gained interest for applications as wearable devices and relating to the Internet of Things. However, existing strain sensor arrays are usually unable to achieve accurate directional recognition and experience a trade-off between high sensing resolution and large area detection. Here, based on classical Mie resonance, we report a flexible meta-sensor array that can detect the in-plane direction and magnitude of preloaded strains by referencing a dynamically transmitted terahertz (THz) signal. By building a one-to-one correspondence between the intrinsic electrical/magnetic dipole resonance frequency and the horizontal/perpendicular tension level, arbitrary strain information across the meta-sensor array is accurately detected and quantified using a THz scanning setup. Particularly, with a simple preparation process of micro template-assisted assembly, this meta-sensor array offers ultrahigh sensor density (~11.1 cm −2 ) and has been seamlessly extended to a record-breaking size (110 × 130 mm 2 ), demonstrating its promise in real-life applications.

multidisciplinary sciences

What problem does this paper attempt to address?

The paper aims to address the following issues:

1. **Accurate Direction Identification**: Existing strain sensor arrays usually cannot achieve accurate direction identification.
2. **Trade-off Between High Resolution and Large Area Detection**: There is a contradiction between high resolution and large area detection in existing strain sensor arrays.
3. **Multidirectional Strain Sensing Capability**: It is necessary to integrate multidirectional strain sensing capability into strain sensor arrays to adapt to various surface strain environments.

To solve these problems, the paper proposes a flexible metasensor array based on the classical Mie resonance principle, which can detect the direction and magnitude of in-plane preloaded strain by referencing dynamically transmitted terahertz (THz) signals. This metasensor array has an ultra-high sensor density (approximately 11.1 cm^-2) and can be seamlessly expanded to record-breaking sizes (110 × 130 mm^2). This indicates its great potential in practical applications, especially in the sensing layer of wearable devices and the Internet of Things (IoT).