Abstract:The tuning of sensitivity and dynamic range in linear magnetic sensors is required in various applications. We demonstrate the control and design of the sensitivity in magnetic tunnel junction (MTJ) sensors with a vortex-type sensing layer. In this work, we develop sensor MTJs with NiFe sensing layers having a vortex magnetic configuration. We demonstrate that by varying the pinned layer size, the sensitivity to magnetic field is tuned linearly. We obtain a high magnetoresistance ratio of 140 %, and we demonstrate a controllable sensitivity from 0.85 to 4.43 %/Oe, while keeping the vortex layer fixed in size. We compare our experimental results with micromagnetic simulations. We find that the linear displacement of vortex core by an applied field makes the design of vortex sensors simple. The control of the pinned layer geometry is an effective method to increase the sensitivity, without affecting the vortex state of the sensing layer. Furthermore, we propose that the location of the pinned layer can be used to realize more sensing functionalities from a single sensor.
What problem does this paper attempt to address?
The problem that this paper attempts to solve is how to control and design the sensitivity of a vortex - type magnetic tunnel junction (MTJ) magnetic sensor by fixing the size of the vortex layer and only changing the geometry of the pinned layer. Specifically, the author shows that by adjusting the size of the pinned layer, the sensitivity to the magnetic field can be linearly tuned while maintaining the fixed size of the vortex layer. This method provides a new degree of freedom to design the sensitivity of the sensor without affecting the stability of the vortex state.
### Background
Traditional semiconductor Hall sensors are widely used in many applications. However, with the continuous growth of demands in fields such as automobiles, the Internet of Things (IoT), and biomedicine, there is a need for linear magnetic sensors with higher sensitivity, wider dynamic range, low nonlinearity, low power consumption, and low noise. Vortex - type magnetic sensors, due to their unique magnetic structure and low - noise characteristics, become potential candidates to meet these requirements.
### Problem Description
1. **Requirements for High Sensitivity and Wide Dynamic Range**:
- Many emerging applications require sensors that can measure magnetic fields over multiple orders of magnitude, for example, current changes from < 100 nA to 1.0 A.
- In automotive applications, there are also multiple sensitivity requirements for angle, position, and power sensing.
2. **Limitations of Existing Methods**:
- A single magnetoresistive (MR) element usually designs sensitivity by selecting different ferromagnetic induction layer materials, which limits the flexibility of design.
- Using a low - anisotropy soft ferromagnetic layer can increase sensitivity, but it will introduce significant self - correlation noise and an increase in coercive force.
3. **Advantages of the Vortex Structure**:
- The magnetic vortex structure has low - noise and almost hysteresis - free characteristics, making it an ideal magnetic sensor material.
- By adjusting the position of the vortex core, a linear magnetic response can be achieved.
### Solution
The author proposes a method to control the sensitivity of a vortex - type MTJ sensor by changing the diameter of the pinned layer. The specific steps are as follows:
1. **Experimental Design**:
- Prepared an MTJ sensor with a vortex - type sensing layer, with the vortex layer diameter fixed at 10 µm.
- Prepared pinned layers with different diameters (2rt = 2.0 - 9.5 µm) through electron - beam lithography and Ar - ion etching techniques.
2. **Result Analysis**:
- By changing the diameter of the pinned layer, the sensitivity of the sensor can be linearly tuned.
- The experimental results show that the sensitivity can be increased from 0.85 %/Oe to 4.43 %/Oe, while the effective dynamic range is reduced from 156 Oe to 31 Oe.
- Micromagnetic simulations verify the experimental results, indicating that the linear displacement of the vortex core simplifies the sensor design.
### Conclusion
By adjusting the geometry of the pinned layer, the sensitivity of the vortex - type MTJ sensor can be effectively controlled and designed without changing the size of the vortex layer. This method provides a new degree of freedom for designing magnetic sensors with different dynamic ranges, making them suitable for a wide range of magnetic sensing applications.