Abstract:Silicon substrate on-chip (SSOC) supercapacitors have recently attracted considerable attention in electronic devices because of their compatibility with the current silicon-based micro- and nanofabrication processes. However, the low-energy density of the silicon substrate supercapacitors largely restricts their practical applications. Herein, <i>in situ</i> polymerization of coral-like polyaniline (PANI) was performed over the surfaces of aligned silicon nanowires (SiNWs) prepared by the metal-assisted chemical etching process. Especially, the coral-like morphology of the PANI over the aligned SiNWs () is regulatable with the control of the concentration of the aniline monomer. After systematical structural characterization of by field emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, and Raman spectroscopy, it is confirmed that the coral-like morphology provides higher specific surface area and more effective charge transport channels, which essentially benefits the exchange of the aqueous electrolytes on the surface of the electrode to improve the electrochemical performances of the material. Therefore, compared to individual PANI and SiNWs, the prepared supercapacitor electrode exhibited a much higher areal capacitance of ∼95 mF/cm<sup>2</sup> at a scan rate of 10 mV/s. The obtained electrode exhibited reliable stable cyclability with a capacitance retention of 71.8% of the initial value compared with pure PANI. The presented work demonstrates a feasible approach to improve the areal capacitance value of SSOC supercapacitors.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsaem.0c01963?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsaem.0c01963</a>.Preparation of electrode; effect of etching time on the lengths of SiNWs; morphologies of (prepared at 1.6 mmol/L ANI) with different lengths of SiNWs; areal capacitance of (prepared at 1.6 mmol/L ANI) with different lengths of SiNWs; calculation of the surface area; TEM image of the ; effect of ANI concentration on the hydrophily of electrode; structure and electrochemical performance of the electrode before and after cycle; photo of the symmetric solid-state on-chip supercapacitors; Ragone plots of the device compared with the data in the reported studies (<a class="ext-link" href="/doi/suppl/10.1021/acsaem.0c01963/suppl_file/ae0c01963_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

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