Abstract:Integrated quantum photonics leverages the on-chip generation of nonclassical states of light to realize key functionalities of quantum devices. Typically, the generation of such nonclassical states relies on whispering gallery mode resonators, such as integrated optical micro-rings, which enhance the efficiency of the underlying spontaneous nonlinear processes. While these kinds of resonators excel in maximizing either the temporal confinement or the spatial overlap between different resonant modes, they are usually associated with large mode volumes, imposing an intrinsic limitation on the efficiency and footprint of the device. Here, we engineer a source of time-energy entangled photon pairs based on a silicon photonic crystal cavity, implemented in a fully CMOS-compatible platform. In this device, resonantly enhanced spontaneous four-wave mixing converts pump photon pairs into signal/idler photon pairs under the energy-conserving condition in the telecommunication C-band. The design of the resonator is based on an effective bichromatic confinement potential, allowing it to achieve up to nine close-to-equally spaced modes in frequency, while preserving small mode volumes, and the whole chip, including grating couplers and access waveguides, is fabricated in a single run on a silicon-on-insulator platform. Besides demonstrating efficient photon pair generation, we also implement a Franson-type interference experiment, demonstrating entanglement between signal and idler photons with a Bell inequality violation exceeding five standard deviations. The high generation efficiency combined with the small device footprint in a CMOS-compatible integrated structure opens a pathway toward the implementation of compact quantum light sources in all-silicon photonic platforms.

Frequency-bin entangled comb of photon pairs from a Silicon-on-Insulator micro-resonator

Generation of Frequency-Degenerate Photon Pairs in a Bidirectionally Pumped Silicon Micro-Ring Resonator

Engineering biphoton spectral wavefunction in a silicon micro-ring resonator with split resonances

Generation of entangled photon pairs from a silicon bichromatic photonic crystal cavity

Discrete Frequency Entangled Photon Pair Generation Based on Silicon Micro-ring Cavities

Broadband generation of photon-pairs from a CMOS compatible device

Ultra-compact, Tunable Photon Pair Source for Pulsed Temporal-mode Encoding

Comb-Like Frequency-Bin Entangled Photon Pair Generation in Silicon Nitride Microring Resonators

A reconfigurable silicon photonics chip for the generation of frequency bin entangled qudits

Photon pair generation via down-conversion in III-V semiconductor microrings: modal dispersion and quasi-phase matching

Comb-Like Photon Pair Generation in Silicon Nitride Microring Resonators

Laser soliton microcombs on silicon

Telecom-band Degenerate-Frequency Photon Pair Generation in Silicon Microring Cavities

Laser Soliton Microcombs Heterogeneously Integrated on Silicon

A squeezed quantum microcomb on a chip

Quantum frequency conversion and strong coupling of photonic modes using four-wave mixing in integrated microresonators

High Visibility Time-Energy Entangled Photons from a Silicon Nanophotonic Chip

Performance evaluation of silicon-chip-based mid-infrared Kerr optical frequency combs with ridge cross section

Chip-integrated visible-telecom photon pair sources for quantum communication

Entangled photon pair generation in an integrated SiC platform

On-Chip Quantum Interference from a Single Silicon Ring Resonator Source