A capacitive flexible tactile sensor

Dandan Yuan,Haoxin Shu,Yulong Bao,Bin Xu,Huan Wang
DOI: https://doi.org/10.48550/arXiv.2111.00412
2021-10-31
Abstract:In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile sensing unit of the sensor. The structure of capacitive flexible tactile sensor was designed and an experimental platform was established to test the performance. The tests show that when the thickness of the intermediate layer is 2 mm and the density is medium, the sensor's sensitivity is the best while the time of both the response and the rebound is fast.
Materials Science,Applied Physics
What problem does this paper attempt to address?
This paper aims to design a capacitive flexible tactile sensor based on MEMS technology for measuring the pressure of objects. The focus of the research is on optimizing the structural parameters of the sensor, especially the thickness and density of the intermediate dielectric layer, in order to obtain the best sensitivity and fast response and rebound time. By experimentally comparing the sensor performance under different parameters, it is finally determined that when the thickness of the intermediate dielectric layer is 2 mm and the density is moderate, the comprehensive performance of the sensor is the best. This provides an effective solution for tactile perception in robotics.