Abstract:FIB‐SEM reconstruction in combination with physical data such as direct SEM images and porosimetry analyses can be combined to provide a full morphological assessment of the material. In recent years, the potential of porous soft materials in various device technologies has increased in importance due to applications in fields, such as wearable electronics, medicine, and transient devices. However, understanding the 3‐dimensional architecture of porous soft materials at the microscale remains a challenge. Herein, we present a method to structurally analyze soft materials using Focused Ion Beam – Scanning Electron Microscopy (FIB‐SEM) tomography. Two materials, polymethyl methacrylate (PMMA) membrane and pine wood veneer were chosen as test‐cases. FIB‐SEM was successfully used to reconstruct the true topography of these materials in 3D. Structural and physical properties were subsequently deduced from the rendered 3D models. The methodology used segmentation, coupled with optimized thresholding, image processing, and reconstruction protocols. The 3D models generated pore size distribution, pore inter‐connectivity, tortuosity, thickness, and curvature data. It was shown that FIB‐SEM tomography provides both an informative and visual depiction of structure. To evaluate and validate the FIB‐SEM reconstructions, porous properties were generated from the physical property analysis techniques, gas adsorption analysis using Brunauer‐Emmett‐Teller (BET) surface area analysis and mercury intrusion porosimetry (MIP) analysis. In general, the data obtained from the FIB‐SEM reconstructions was well‐matched with the physical data. Research Highlights Porous specimens of both synthetic and biological nature, a poly(methyl methacrylate) membrane and a pine veneer respectively, are reconstructed via FIB‐SEM tomography without resin‐embedding. Different thresholding and reconstruction methods are explored whereby shadowing artifacts are present with the aid of free open‐source software. Reconstruction data is compared to physical data: MIP, gas adsorption isotherms which are analyzed via BET and Barrett‐Joyner‐Halenda (BJH) analysis to yield a full picture of the materials.

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