Abstract:<sec>Spin qubits in silicon-based semiconductor quantum dots have become one of the prominent candidates for realizing fault-tolerant quantum computing due to their long coherence time, good controllability, and compatibility with modern advanced integrated circuit manufacturing processes. In recent years, due to the remarkable advances in silicon-based materials, the structure of quantum dot and its fabrication process, and qubit manipulation technology, the great progress of high-fidelity state preparation and readout, single- and two-qubit gates of spin qubits for silicon based semiconductor quantum computation has been achieved. The control fidelities for single- and two-qubit gates all exceed 99%—fault tolerance threshold required by the surface code known for its exceptionally high tolerance to errors. In this paper, we briefly introduce the basic concepts of silicon-based semiconductor quantum dots, discuss the state-of-art technologies used to improve the fidelities of single- and two-qubit gates, and finally highlight the research directions that should be focused on.</sec><sec>This paper is organized as follows. Firstly, we introduce three major types of quantum dot (QD) devices fabricated on different silicon-based substrates, including Si/SiGe heterojunction and Si/SiO<sub>2</sub>. The spin degree of electron or nucleus hosted in QD can be encoded into spin qubits. Electron spin qubits can be thermally initialized to ground state by using an electron reservoirs, and can be read out by spin-charge conversion mechanism: energy-selective readout (Elzerman readout) with reservoirs or Pauli spin blockade (PSB) without reservoirs. Additionally, high fidelity single-shot readout has been demonstrated by using radio-frequency gate reflectometry combined with the PSB, which has unique advantages in large-scale qubit array. To coherently control the spin qubits, electron dipole resonance (ESR) or electron dipole spin resonance (EDSR) for electron and nuclear magnetic resonance (NMR) for nucleus are introduced. With the help of isotope purification greatly improving the dephasing time of qubit and fast single-qubit manipulation based on EDSR, fidelity above 99.9% can be reached. For the two-qubit gates based on exchange interaction between electron spins, the strength of interaction <inline-formula><tex-math id="M1">\begin{document}$ J $\end{document}</tex-math><alternatives><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="23-20221900_M1.jpg"/><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="23-20221900_M1.png"/></alternatives></inline-formula> combined with Zeeman energy difference <inline-formula><tex-math id="M2">\begin{document}$ \Delta {E}_{z} $\end{document}</tex-math><alternatives><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="23-20221900_M2.jpg"/><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="23-20221900_M2.png"/></alternatives></inline-formula> determines the energy levels of system, which lead to the different two-qubit gates, such as controlled-Z (CZ), controlled-Rotation (CROT), and the square root of the SWAP gate (<inline-formula><tex-math id="M3">\begin{document}$ \sqrt{\rm{S}\rm{W}\rm{A}\rm{P}} $\end{document}</tex-math><alternatives><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="23-20221900_M3.jpg"/><graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="23-20221900_M3.png"/></alternatives></inline-formula>) gates. In order to improve the fidelity of two-qubit gates, a series of key technologies is used experimentally, they being isotope purification, symmetry operation, careful Hamiltonian engineering, and gate set tomography. Fidelity of two-qubit gates exceeding 99% has been demonstrated for electron spin qubits in Si/SiGe quantum dots and nuclear spin qubits in donors. These advances have pushed the silicon-based spin qubit platform to become a major stepping stone towards fault-tolerant quantum computation. Finally, we discuss the future study of spin qubits, that is, how to effectively expand the number of qubits, and many other problems to be explored and solved.</sec>

Quantum tomography of an entangled three-spin state in silicon

Quantum error correction with silicon spin qubits

Precision tomography of a three-qubit donor quantum processor in silicon

Observation of quantum nonlocality in Greenberger-Horne-Zeilinger entanglement on a silicon chip

Three-dimensional entanglement on a silicon chip

Generation of Three-Qubit Entangled States Using Superconducting Phase Qubits.

18-qubit entanglement with photon's three degrees of freedom

Two-qubit silicon quantum processor with operation fidelity exceeding 99%

Coherent spin qubit transport in silicon

Grover's algorithm in a four-qubit silicon processor above the fault-tolerant threshold

High-fidelity four-photon GHZ states on chip

Tomography of entangling two-qubit logic operations in exchange-coupled donor electron spin qubits

Generation and Control of Greenberger-Horne-Zeilinger Entanglement in Superconducting Circuits

Spin-orbit coupling and operation of multi-valley spin qubits

Experimental optimal verification of three-dimensional entanglement on a silicon chip

Integrated silicon qubit platform with single-spin addressability, exchange control and robust single-shot singlet-triplet readout

Silicon CMOS architecture for a spin-based quantum computer

Optical single-shot readout of spin qubits in silicon

Demonstration of Entanglement of Electrostatically Coupled Singlet-Triplet Qubits

New progress of silicon-based semiconductor quantum computation

Generation and verification of 27-qubit Greenberger-Horne-Zeilinger states in a superconducting quantum computer