Abstract:State-of-the-art transmon qubits rely on large capacitors which systematically improves their coherence due to reduced surface loss participation. However, this approach increases both the footprint and the parasitic cross-coupling and is ultimately limited by radiation losses - a potential roadblock for scaling up quantum processors to millions of qubits. In this work we present transmon qubits with sizes as low as 36$ \times $39$ \mu$m$^2$ with $\gtrsim$100 nm wide vacuum gap capacitors that are micro-machined from commercial silicon-on-insulator wafers and shadow evaporated with aluminum. After the release in HF vapor we achieve a vacuum participation ratio up to 99.6\% in an in-plane design that is compatible with standard coplanar circuits. Qubit relaxation time measurements for small gaps with high vacuum electric fields of up to 22 V/m reveal a double exponential decay indicating comparably strong coupling to long-lived two-level-systems (TLS). The exceptionally high selectivity of $>$20 dB to the superconductor-vacuum surface allows to precisely back out the sub-single-photon dielectric loss tangent of aluminum oxide exposed to ambient conditions. In terms of future scaling potential we achieve a qubit quality factor by footprint area of $20 \mu \mathrm{s}^{-2}$, which is on par with the highest $T_1$ devices relying on larger geometries and expected to improve substantially for lower loss superconductors like NbTiN, TiN or Ta.

Compact Superconducting Microwave Resonators Based on -Al Capacitors

Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications

Building Compact Superconducting Microwave Resonators with Hilbert Space-Filling Curves

Superconducting quantum memory with a suspended coaxial resonator

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Compact vacuum gap transmon qubits: Selective and sensitive probes for superconductor surface losses

Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits

Compact inductor-capacitor resonators at sub-gigahertz frequencies

Miniaturizing Transmon Qubits Using van der Waals Materials

Superconducting Coplanar Waveguide Resonators Capable of Cofabrication with Josephson Junctions

Planar Superconducting Whispering Gallery Mode Resonators

Low-loss superconducting aluminum microwave coplanar waveguide resonators on sapphires for the qubit readouts

Implementation of a transmon qubit using superconducting granular aluminum

Superconducting Resonators with Voltage-Controlled Frequency and Nonlinearity

Experimentally verified, fast analytic and numerical design of superconducting resonators in flip-chip architectures

High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices

Compact superconducting transmon qubit circuits made of ultrathin NbN

Microwave Quantum Memcapacitor Effect

Granular aluminum: A superconducting material for high impedance quantum circuits