Broadband achromatic thermal metalens with a wide field of view based on wafer-level monolithic processes

Yen-Chun Chen,Wei-Lun Hsu,Qiu-Chun Zeng,Chen-Yi Yu,Pin-Do Chen,Che-Chin Chen,Yu-Hsin Lin,Fong-Zhi Chen,Chih-Ming Wang
DOI: https://doi.org/10.1063/5.0220043
IF: 4
2024-07-29
Applied Physics Letters
Abstract:We present a monolithic metalens free of chromatic aberration over the 8–12 μm wavelength range for thermal imaging. The metalens consists of nano-donut-pillars for dispersion engineering. The proposed metalens design is based on a telecentric optical system, which effectively eliminates off-focus distortion and aberration, enhancing overall imaging quality. Offering a 90° field of view, the metalens ensures uniform focal spot sizes within a 45° field angle across the working wavelength. This enables the capture of high-quality thermal images with sharp images and minimal distortion. With a diameter of 5.75 mm, the metalens is suitable for integration into commercial thermal imaging cameras. The nano-donut-pillar structure of the metalens allows for relatively straightforward mass production, involving i-line stepper lithography and silicon deep etching processes.
physics, applied
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