Single crystal diamond pyramids for applications in nanoscale quantum sensing

Marietta Batzer,Brendan Shields,Elke Neu,Claudia Widmann,Christian Giese,Christoph Nebel,Patrick Maletinsky

DOI: https://doi.org/10.1364/OME.380362

2019-10-24

Abstract:We present a new approach combining top down fabrication and bottom up overgrowth to create diamond photonic nanostructures in form of single-crystalline diamond nanopyramids. Our approach relies on diamond nanopillars, that are overgrown with single-crystalline diamond to form pyramidal structures oriented along crystal facets. To characterize the photonic properties of the pyramids, color centers are created in a controlled way using ion implantation and annealing. We find very high collection efficiency from color centers close to the pyramid apex. We further show excellent smoothness and sharpness of our diamond pyramids with measured tip radii on the order of 10 nm. Our results offer interesting prospects for nanoscale quantum sensing using diamond color centers, where our diamond pyramids could be used as scanning probes for nanoscale imaging. There, our approach would offer signifikant advantages compared to the cone-shaped scanning probes which define the current state of the art.

Mesoscale and Nanoscale Physics,Quantum Physics

What problem does this paper attempt to address?

The main problem that this paper attempts to solve is the limitations of existing diamond nanostructures in nanoscale quantum sensing applications. Specifically, the current single - crystal diamond scanning probes have the following problems:

1. **Surface damage and poor coherence**: Due to the hardness and chemical inertness of single - crystal diamond (SCD), plasma etching is required during the nanofabrication process, which will cause damage to the SCD surface and thus affect the coherence of the sensing spin.

2. **Non - ideal tip shape**: Current single - color - center SCD scanning probes usually present a truncated - cone shape, with a relatively blunt circular end face and a diameter of about 200 nanometers. Although this shape is beneficial for photon properties, it performs poorly in atomic force microscope (AFM) imaging, especially for high - resolution imaging of non - planar samples.

3. **Low photon collection efficiency**: The existing tip designs fail to fully utilize the photon characteristics, resulting in a relatively low fluorescence collection efficiency, which thus affects the sensitivity.

To solve these problems, the authors propose a new method, combining "top - down" (etching) and "bottom - up" (overgrowth) manufacturing techniques to create nanoscale - sharp single - crystal diamond pyramid structures. These pyramids have the following advantages:

- **Extremely high photon collection efficiency**: Through the optimized growth process, the color centers near the top of the pyramid exhibit a very high photon collection efficiency.

- **Extremely sharp tips**: Measurements show that the tip radius of the pyramid is about 10 nanometers, which is very suitable for high - resolution AFM imaging.

- **Excellent surface smoothness**: Compared with traditional etching methods, the diamond surface grown by chemical vapor deposition (CVD) is smoother, which helps to maintain a long spin coherence time.

Therefore, this research provides a promising new tool for nanoscale quantum sensing, especially in the scanning probe configuration, which can significantly improve the spatial resolution and sensitivity.