Abstract:It is significant to prepare large-scale and high-quality graphene on SiC substrate for the research of the device in nanoelectronics. This review presents a brief overview on the progress in the growth mechanism for epitaxial graphene on SiC substrate surface, the methods of modification and the research of graphene-based devices. Graphene has attracted the interest of the scientists due to its exceptional electronic properties, which make it a promising material for nanoelectronics. Nowadays, the high-quality epitaxial graphene can be obtained with the smooth morphology, few defects, large size by controling the environment, annealing temperature and vapor pressure. The special structure that the first carbon layer grown above the Si-terminated SiC substrate form strong covalent bonds with substrate, results in some unusual properties such as opening a band gap in the graphene bilayer and a n-type doping of the graphene layers. The rotated fault, which is owed to decoupling effect, has been observed in C-terminated multilayer graphene. And such intrinsic properties of graphene depend on the atom type of SiC surface, surface state, weakness of bonds and the transformation of the electrons between the few-layer graphene and SiC substrate. Some limitations (such as little band gap, intrinsic n-type character, etc.) resulted from the properties of epitaxial graphene must be overcome for the device application. Thus tremendous effort has been devoted to achieve the deliberate control of the band gap, the density and character of its charge carriers. Having a deep understanding of the unique properties for epitaxial graphene, this article then selectively reviews modification methods by considing the type of atoms, size of atoms, work function and electron affinity. In order to manufacture well-behaved devices, many of the fundamental problems of graphene-based eletronics, including methods to make metal contacts, nanoscale patterning and other technical details should be addressed perfectly. It is also important to control the material of gate, modulate the face of substrate, the width of channel in order to improve the performance of the graphene-based devices such as carrier mobility and I-on/I-off ratios. The combination between the experiment and calculation (such as Monte Carlo simulation, density functional theory, molecular dynamics simulation etc.) can make a deeper understanding of the effects of SiC substrate and the methods of modification, which can be served as a guide for further research.

Epitaxial electrical contact to graphene on SiC

Progress of Properties, Modification and Applications of Graphene on SiC Substrate

Scalable fabrication of edge contacts to 2D materials

Towards pristine graphene-metal interface and microstructures: Laser assisted direct patterning on Epitaxial graphene

Growth of Large Domain Epitaxial Graphene on the C-Face of SiC

High quality epitaxial graphene on 4H-SiC by face-to-face growth in ultra-high vacuum

One-Dimensional Electrical Contact to a Two-Dimensional Material

Directed self-organization of graphene nanoribbons on SiC

Enhanced electrical properties of hybrid monolayer graphene and insulating flat Si3N4 with bottom-up stenciled electrodes

Epitaxial Graphene on Silicon toward Graphene-Silicon Fusion Electronics

Large area and structured epitaxial graphene produced by confinement controlled sublimation of silicon carbide

Self-Terminating Confinement Approach for Large-Area Uniform Monolayer Graphene Directly over Si/Siox by Chemical Vapor Deposition

Electronic interface and charge carrier density in epitaxial graphene on silicon carbide. A review on metal–graphene contacts and electrical gating

Epitaxial graphene on SiC: Modification of structural and electron transport properties by substrate pretreatment

Wafer-Scale Single-Crystal Monolayer Graphene Grown Directly on Insulating Substrates

Insulating SiO 2 under Centimeter-Scale, Single-Crystal Graphene Enables Electronic-Device Fabrication

Insulating SiO2 under Centimeter-Scale, Single-Crystal Graphene Enables Electronic-Device Fabrication

Chemical Vapor Deposition of Graphene on Self-Limited SiC Interfacial Layers Formed on Silicon Substrates for Heterojunction Devices

Laser-induced Growth of Large-Area Epitaxial Graphene with Low Sheet Resistance on 4H-Sic(0001)

Wafer-scale single-crystal monolayer graphene grown on sapphire substrate

Graphene-enhanced van der Waals contacts between three-dimensional metals and two-dimensional semiconductors